Manual SS Sapphire-Sealed Variable Leak Valve (CF Flanged)
Bakeable leak valves are used to control the flow of gas into a vacuum system from an external source. A soft metal pad is compressed against a harder metal seat, creating the necessary seal for precise gas flow control.
- Typical applications include argon processing, sputtering, system purging, precision gas control, and laser back-filling
- Stainless steel, sapphire and copper alloy construction for long life
- Inlet pressure to 34 bar maximum
- Operating pressure from 1 bar to 10-11 Torr
- Extremely precise control mechanism
- Bakeable to 450°C in either open or closed position
- User serviceable
Specifications Table
| Temperature (°C) |
Up to 450°C in either open or closed position |
| Material |
300 series stainless steel, sapphire, OFHC copper and copper alloy |
| Leak Rate (cc/sec) |
1 x 10-9 Torr-liters/sec in normal operation; 1 x 10-10 Torr-liters/sec with condensable vapors eliminated from leak gas; The valve provides an increasing rate of change as the size of the leak increases giving precise control in proportion to size |
| Weight |
1.8 kg (4 lbs) |
| Max. Inlet Pressure(psi) |
500 psi maximum |
| Vacuum Rating |
From atmospheric to pressure below 10-11 Torr |
| Gasket Life |
For unbaked systems, approximately 300 closures; For baked systems, approximately 20 to 30 closures *Gasket assemblies are replaceable* |
Dimensional Drawings
