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Vacuum Valves

VAT Valves

Gate and Pendulum Valves (A)

are mostly used for turbo and cryo pump isolation. Besides the semiconductor industry, they are often used in FPD production systems, in the coating industry, in R&D, etc.

Control Valves (B)

in combination with a controller control the pressure in vacuum processes. The control valve is installed between the process chamber and the pump in order to control the pumping speed. This ensures fast and accurate process pressure control.

Transfer Valves and Doors for Semi (C)

are used for loadlock and process chamber isolation. The valves, or as a space-saving option only the inserts, are installed between chambers or integrated. Doors are used for isolation on the atmospheric pressure side. The sizes are in accordance with the SEMI standards, but customer specifed dimensions are possible.

Angle or Diaphragm Valves (E)

are shut-off devices for vacuum processes where an optically free passage is not required. The angle dimensions (mounting dimensions) are in conformity with the dimensions of commercial components (e. g. elbows, T-pieces, etc.). Exchangeability is therefore ensured.