in combination with a controller control the pressure in vacuum processes. The control valve is installed between the process chamber and the pump in order to control the pumping speed. This ensures fast and accurate process pressure control.
are used for loadlock and process chamber isolation. The valves or inserts, are installed between chambers or are integrated. Doors are used for isolation on the atmospheric pressure side. The sizes are in accordance with the SEMI standards, but customer specifed dimensions are possible.
are shut-off devices for vacuum processes where an optically free passage is not required. The angle dimensions (mounting dimensions) are in conformity with the dimensions of commercial components (e. g. elbows, T-pieces, etc.) and ensure Exchangeability.
are sector shut-off devices in storage rings in order to minimize the RF loss and to increase the beam life. Safety devices such as fast closing valves/shutters are used to prevent air inrush. Beam stoppers protect experiments from beam load.