Vacuum Valves > VAT Valves
Series 211
For introducing a controlled, reproducible flow of gas into a vacuum chamber.
Series 220
For roughing / backing line isolation and rough metering of gases and liquids.
Series 244
For pumping and venting of vacuum systems with large gas flows. Resistance against high differential pressure. Long lifetime
Series 245
For pumping and venting of vacuum systems with large gas flows. Resistance against differential pressure. Long lifetime
Series 284
For pumping and venting of UHV systems when an extremely low outgassing rate is important. Extremly low outgassing rate. Resistant against high differential pressure. Stationary rotatable CF flange.
Series 292
For pumping and venting of HV systems when few turbulences, particles, substrate movements and condensation are important. Resistance against differential pressure. Setting of the orifice opening by means of a scale.
Series 590
Gas inlet valve for smallest gas flows to control the process pressure.
Angle Valves, Diaphragm Valves

Dosing Valve
Series 211
For introducing a controlled, reproducible flow of gas into a vacuum chamber.

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Diaphragm Valve (Dn 16 - 40)
Series 220
For roughing / backing line isolation and rough metering of gases and liquids.
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Vacuum Angle Valve (Dn10 - 250)
Series 244
For pumping and venting of vacuum systems with large gas flows. Resistance against high differential pressure. Long lifetime
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Vacuum Inline Valve (Dn10 - 50; Dn80)
Series 245
For pumping and venting of vacuum systems with large gas flows. Resistance against differential pressure. Long lifetime
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UHV Angle Valve (Dn16, Dn40, Dn63)
Series 284
For pumping and venting of UHV systems when an extremely low outgassing rate is important. Extremly low outgassing rate. Resistant against high differential pressure. Stationary rotatable CF flange.
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Angle Valve with Soft-pump (Dn100 - 160)
Series 292
For pumping and venting of HV systems when few turbulences, particles, substrate movements and condensation are important. Resistance against differential pressure. Setting of the orifice opening by means of a scale.


Variable Leak Valve
Series 590
Gas inlet valve for smallest gas flows to control the process pressure.