Control Valves
Vacuum Valves > VAT Valves
Butterfly Valve Control System (Series 612)
Butterfly pressure control valves for downstream applications. Very fast and strong actuator. High-performance, integrated controller. Extremely short control response times and position indication. Automatic maintenance indication. Service port (conection for computer or service box 2 connection). Excellent resistance to contaminating processes.
Butterfly with Sealing Function (Series 615)
Downstream pressure control and isolation valve Compact design Fast operation High-performance, integrated controller Low minimum controllable conductance
HV Control Gate Valves (Series 642)
HV Control gate valves with stepper motor for controlling and isolation.
UHV Control Gate Valve (Series 648)
UHV GATE CONTROL VALVE,
Control Pendulum Valve (Series 650)
Pressure control and isolation valves with pendulum plate for downstream applications. Compact design. Fast, virtually particle-free and shock-free operation. Powerful integrated controller.
Pendulum Valve Control System (Series 651)
Pressure control and isolation valves with extended control range, based on the pendulum principle. For downstream applications. Compared to Series 650, Series 651 achieves considerably shorter pressure rise times at low gas flows. Compact design. Fast, virtually particle-free and shock-free operation. Powerful integrated controller.
Pendulum Valve Control System (Series 652)
Series 652 Downstream pressure control and Isolation valve Compact design Very fast, virtually particle-free and shock-free operation High-performance, integrated controller