Vacuum Valves > VAT Valves
Series 612
Butterfly pressure control valves for downstream applications. Very fast and strong actuator. High-performance, integrated controller. Extremely short control response times and position indication. Automatic maintenance indication. Service port (conection for computer or service box 2 connection). Excellent resistance to contaminating processes.
Series 615
Downstream pressure control and isolation valve Compact design Fast operation High-performance, integrated controller Low minimum controllable conductance
Series 642
HV Control gate valves with stepper motor for controlling and isolation.
Series 650
Pressure control and isolation valves with pendulum plate for downstream applications. Compact design. Fast, virtually particle-free and shock-free operation. Powerful integrated controller.
Series 651
Pressure control and isolation valves with extended control range, based on the pendulum principle. For downstream applications. Compared to Series 650, Series 651 achieves considerably shorter pressure rise times at low gas flows. Compact design. Fast, virtually particle-free and shock-free operation. Powerful integrated controller.
Series 652
Series 652 Downstream pressure control and Isolation valve Compact design Very fast, virtually particle-free and shock-free operation High-performance, integrated controller
Control Valves
Butterfly Valve Control System
Series 612
Butterfly pressure control valves for downstream applications. Very fast and strong actuator. High-performance, integrated controller. Extremely short control response times and position indication. Automatic maintenance indication. Service port (conection for computer or service box 2 connection). Excellent resistance to contaminating processes.
Butterfly with Sealing Function
Series 615
Downstream pressure control and isolation valve Compact design Fast operation High-performance, integrated controller Low minimum controllable conductance
HV Control Gate Valves
Series 642
HV Control gate valves with stepper motor for controlling and isolation.
Control Pendulum Valve
Series 650
Pressure control and isolation valves with pendulum plate for downstream applications. Compact design. Fast, virtually particle-free and shock-free operation. Powerful integrated controller.
Pendulum Valve Control System
Series 651
Pressure control and isolation valves with extended control range, based on the pendulum principle. For downstream applications. Compared to Series 650, Series 651 achieves considerably shorter pressure rise times at low gas flows. Compact design. Fast, virtually particle-free and shock-free operation. Powerful integrated controller.
Pendulum Valve Control System
Series 652
Series 652 Downstream pressure control and Isolation valve Compact design Very fast, virtually particle-free and shock-free operation High-performance, integrated controller