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Vacuum Valves > VAT Valves

VAT Transfer Valves and Doors for Semiconductors

Transfer Valve Monovat Direct


Series 022
For load lock and process chamber isolation in semiconductor production systems for 200, 300 and 450 mm wafers.

Transfer Valve L-motion


Series 043
For load lock and process chamber isolation in semiconductor production systems. Especially suited for corrosive processes such as etch or CVD.

Atmospheric Door L-VAT


Series 075
For load lock and process chamber isolation on the atmospheric side of semiconductor production systems.



Contact Us - VAT Valves: Transfer valves and doors for semiconductors