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Vacuum Valves > VAT Valves

VAT Angle Valves, Diaphragm Valves

Dosing Valve


Series 211
For introducing a controlled, reproducible flow of gas into a vacuum chamber.

Pressure Relief Valve


Series 212
System and operator protection for system overpressure.

Diaphragm Valve (Dn 16 - 40)


Series 220
For roughing / backing line isolation and rough metering of gases and liquids.

Vacuum Angle Valve (Dn10 - 250)


Series 244
For pumping and venting of vacuum systems with large gas flows. Resistance against high differential pressure. Long lifetime

Vacuum Inline Valve (Dn10 - 50; Dn80)


Series 245
For pumping and venting of vacuum systems with large gas flows. Resistance against differential pressure. Long lifetime

HV Angle Valve (Dn10 - 250)


Series 264
For pumping and venting of HV systems.

HV Inline Valve


Series 265
For pumping and venting of HV systems. Long lifetime

UHV Angle Valve (Dn16, Dn40, Dn63)


Series 284
For pumping and venting of UHV systems when an extremely low outgassing rate is important. Extremly low outgassing rate. Resistant against high differential pressure. Stationary rotatable CF flange.

Angle Valve with Soft-pump (Dn100 - 160)


Series 292
For pumping and venting of HV systems when few turbulences, particles, substrate movements and condensation are important. Resistance against differential pressure. Setting of the orifice opening by means of a scale.

Easy Close All-metal Angle Valve


Series 541
For vacuum processes with extreme UHV requirements.

Variable Leak Valve


Series 590
Gas inlet valve for smallest gas flows to control the process pressure.



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