UHV Gate Valve (Series 108)

The standard valve for UHV isolation applications in research and industry.

Specifications Table

Series Number	108
Series Name	UHV Gate Valve
Description	The standard valve for UHV isolation applications in research and industry.
Actuator Types	3-position pneumatic actuator, Manual actuator (hand wheel), Pneumatic actuator (double acting)
Sealing Technology	VATLOCK-System
Sealing Gate	FKM (VITON®)
Sealing Bonnet	Metal
Feedthrough	Bellows
Leak Rate - Body	< 5 . 10-10 mbar ls-1
Leak Rate - Seat	< 1 . 10-9 mbar ls-1
Nominal inside diameters (ID) in mm (inches)	63 (2 1/2") - 320 (12")
Body material	Stainless steel

Dimensional Drawings

Valve

Customer specified flanges with/without watercooling
Other sealing materials
O-ring seal in gate with DN 63, 100, 160, 200 instead of the vulcanized seal
Ports for roughing (by-pass), venting or for gauges in various positions possible
Space saving compact version available: sizes on request
Special gate for the installation of various foils
Window in gate with DN 63, 100, 160, 200
Special valve gate for the installation of various foils
Ports for roughing (by-pass), venting, purging or for or gauges; others positions on request

Actuator

Solenoid valve for impulse actuation: last valve position is maintained at power failure
Solenoid valve separate, for external mounting
Other solenoid valve voltage (standard 24VDC)
Manual emergency operation on solenoid valve lockable
Double position indicator (2 switches each for the positions «open» and «closed»)
Bakeable position indicator: manual actuator bakeable to max. 250 °C, pneumatic actuator to max. 200 °C
Position indicator with change-over contact