Large Pendulum Valve (Series 168)
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These valves are mainly used at FPD (Flat Panel Display) production systems for cryo pump isolation. A further field of application is the coating industry as glass coating, foil coating,...
Specifications Table
| Series Number | 168 |
|---|---|
| Series Name | Large Pendulum Valve |
| Description | For applications requiring a compact design in large DN sizes. Especially suited to large coating and FPD production systems. |
| Actuator Types | Pneumatic actuator (double acting), 3-position pneumatic actuator |
| Sealing Technology | VATLOCK-System |
| Sealing Gate | FKM (VITON®) |
| Sealing Bonnet | FKM (VITON®) |
| Feedthrough | Rotary feedthrough |
| Leak Rate - Body | < 1 . 10-9 mbar ls-1 |
| Leak Rate - Seat | < 1 . 10-9 mbar ls-1 |
| Nominal inside diameters (ID) in mm (inches) | 400 (16") - 500 (20") |
| Body material | Aluminum |
Dimensional Drawings
Actuator
Solenoid for 12, 24, 48 V DCSolenoid for 24, 48, 100, 115, 200, 230 V 50/60 Hz
Actuator on A-side (valve seat side)
Valve
Customer specified flangesHeater with insulation and overtemperature switch
Other sealing materials
Splinter shield grid for turbo pump
Window in plate
Ports in body
For direct mounting to chamber