These valves are mainly used at FPD (Flat Panel Display) production systems for cryo pump isolation. A further field of application is the coating industry as glass coating, foil coating,...
Specifications Table
Series Number
168
Series Name
Large Pendulum Valve
Description
For applications requiring a compact design in large DN sizes. Especially suited to large coating and FPD production systems.
Solenoid for 12, 24, 48 V DC
Solenoid for 24, 48, 100, 115, 200, 230 V 50/60 Hz
Actuator on A-side (valve seat side)
Valve
Customer specified flanges
Heater with insulation and overtemperature switch
Other sealing materials
Splinter shield grid for turbo pump
Window in plate
Ports in body
For direct mounting to chamber