Butterfly Valve Control System (Series 612)

Field of application: Semiconductors, FPD / CVD systems and industrial processes.

Specifications Table

Series Number	612
Series Name	Butterfly Valve Control System
Description	Butterfly pressure control valves for downstream applications. Very fast and strong actuator. High-performance, integrated controller. Extremely short control response times and position indication. Automatic maintenance indication. Service port (conection for computer or service box 2 connection). Excellent resistance to contaminating processes.
Actuator Types	Stepper motor, integrated controller
Sealing Technology	Rotary feedthrough (double seal)
Feedthrough	Rotary feedthrough, (Viton)
Leak Rate - Body	< 1 . 10-9 mbar ls-1
Nominal inside diameters (ID) in mm (inches)	25 (1") - 250 (10")
Body material	Aluminium hard anodized; Aluminum; Stainless steel

Dimensional Drawings

Legend

1 - control and actuating unit
2 - coupling
3 - bearing
4 - shaft seal (double)
5 - plate
6 - body

Actuator

Ultra fast actuator (0.1 s)
Controller with configurable PI parameters
Output for control of isolation valve
RS232 interface with 2 analog outputs

Valve

Sizes DN 320
Other flange types (JIS, ASA-LP, CF-F)
Customer specified flanges
Aluminum hard anodized or nickel-plated
Other sealing materials
Heater with insulation for valve temperatures 80°C, 100°C, 120°C
"Combo" body to combine a serie 612 valve with a series 121 isolation valve
"Combo" body to combine a serie 612 valve with a series 264 isolation valve