Series 26 valves are bellows sealed and designed for high vacuum applications in pumping systems, semiconductor technology, research systems, etc.
Specifications Table
Series Number
265
Series Name
HV Inline Valve
Description
For pumping and venting of HV systems. Long lifetime
Actuator Types
Manual actuator (hand wheel removable), Electromagnetic actuator (single acting with closing spring NC, with control electronics), Pneumatic actuator (double acting), Pneumatic actuator (single achting with closing spring NC or opening spring NO)
Sealing Gate
FKM (VITON®)
Sealing Bonnet
FKM (VITON®)
Feedthrough
Bellows
Leak Rate - Body
< 1 . 10-9 mbar ls-1
Leak Rate - Seat
< 1 . 10-9 mbar ls-1
Nominal inside diameters (ID) in mm (inches)
16 (5/8") - 80 (3")
Body material
Aluminum; Stainless steel
Dimensional Drawings
Actuator
DN10 - 50: Solenoid 12, 24, 48, 110 V DC
DN10 - 50: Solenoid with 24, 48, 115, 220 - 230 V / 50 Hz
DN10 - 50: Solenoid with 24, 48, 115, 220 - 230 V / 60 Hz
DN80: Solenoid with 12, 24, 48, 110 V DC
DN80: Solenoid with 24, 48, 100, 110 - 115, 200, 220 - 230 V / 50 Hz
DN80: Solenoid with 24, 100, 110 - 115, 200, 220 - 230 V / 60 Hz
DN10 - 50: Pneumatic actuator with opening spring (NO)
DN100 - 160: Solenoid 24 V DC
DN100 - 160: Other solenoid voltages on request
Solenoid with manual emergency operation
Various pneumatic plug-in connector
Position indicator
Position indicator for 120°C
Position indicator for 150°C
Common 7 - pole plug for position indicator and solenoid (up to 48 V only)