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Variable Leak Valve (Series 590)
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Gas inlet valve to control very small gas flows in processes such as mass spectrometry, industrial applications, R&D, labs, etc.
Specifications Table
| Series Number | 590 |
| Series Name | Variable Leak Valve |
| Description | Gas inlet valve for smallest gas flows to control the process pressure. |
| Actuator Types | Manual actuator (hand wheel), Stepper motor |
| Sealing Gate | Metal |
| Sealing Bonnet | Metal |
| Feedthrough | Diaphragm |
| Leak Rate - Body | < 1 . 10-10 mbar ls-1 |
| Leak Rate - Seat | < 1 . 10-10 mbar ls-1 |
| Nominal inside diameters (ID) in mm (inches) | 16 (5/8") - 16 (5/8") |
| Body material | Stainless steel |
Dimensional Drawings