Mini UHV Gate Valve (Series 010)

The compact mini UHV gate valve featuring a modular actuator concept is well suited for industrial and R&D applications. It is often used in pipings of semiconductor process systems.

Specifications Table

Series Number	010
Series Name	Mini UHV Gate Valve
Description	Mini-UHV-gate valve. General purpose valve for isolation in UHV or other demanding applications. Free of lubricants. Low particle generation. Low shock. Vulcanized gate seal.
Actuator Types	Manual actuator (hand wheel), Pneumatic actuator (double acting), Pneumatic actuator (single achting with closing spring NC)
Sealing Technology	MONOVAT-System
Sealing Gate	FKM (VITON®)
Sealing Bonnet	Metal
Feedthrough	Bellows
Leak Rate - Body	< 5 . 10-10 mbar ls-1
Leak Rate - Seat	< 1 . 10-9 mbar ls-1
Nominal inside diameters (ID) in mm (inches)	16 (5/8") - 50 (2")
Body material	Stainless steel

Dimensional Drawings

Actuator

Solenoid for impulse actuation: actual valve position is maintained at power failure
Solenoid separate, for external mounting
Solenoid for 12, 48 V DC
Solenoid for 24, 48, 100, 115, 200, 230 V / 50 Hz
Solenoid for 24, 100, 115, 200, 230 V / 60 Hz
Manual emergency operation on solenoid lockable
Manual actuator with position indicator
Position indicator for 200°C with connecting cable 0.3 m contact rating: 1A / 48V AC, 1A / 72V DC
Pneumatic actuator, single acting with opening spring (NO)
Version for 1 mio cycles (special bellows)

Valve

Customer specified flanges
Insert version for integration into the vacuum system (without body)
Ohter sealing materials (Chemraz, EPDM etc.)
Window in gate: with seal made of VITON, exchangeable
Special valve gate, suitable to install various foils of orifices
Gate valve for gas analysis
With by-pass valves for gas analysis at high pressures
Gate valve with protective ring (see series 17)