Mini UHV Gate Valve (Series 010)
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The compact mini UHV gate valve featuring a modular actuator concept is well suited for industrial and R&D applications. It is often used in pipings of semiconductor process systems.
Specifications Table
| Series Number | 010 |
|---|---|
| Series Name | Mini UHV Gate Valve |
| Description | Mini-UHV-gate valve. General purpose valve for isolation in UHV or other demanding applications. Free of lubricants. Low particle generation. Low shock. Vulcanized gate seal. |
| Actuator Types | Manual actuator (hand wheel), Pneumatic actuator (double acting), Pneumatic actuator (single achting with closing spring NC) |
| Sealing Technology | MONOVAT-System |
| Sealing Gate | FKM (VITON®) |
| Sealing Bonnet | Metal |
| Feedthrough | Bellows |
| Leak Rate - Body | < 5 . 10-10 mbar ls-1 |
| Leak Rate - Seat | < 1 . 10-9 mbar ls-1 |
| Nominal inside diameters (ID) in mm (inches) | 16 (5/8") - 50 (2") |
| Body material | Stainless steel |
Dimensional Drawings
Actuator
Solenoid for impulse actuation: actual valve position is maintained at power failureSolenoid separate, for external mounting
Solenoid for 12, 48 V DC
Solenoid for 24, 48, 100, 115, 200, 230 V / 50 Hz
Solenoid for 24, 100, 115, 200, 230 V / 60 Hz
Manual emergency operation on solenoid lockable
Manual actuator with position indicator
Position indicator for 200°C with connecting cable 0.3 m contact rating: 1A / 48V AC, 1A / 72V DC
Pneumatic actuator, single acting with opening spring (NO)
Version for 1 mio cycles (special bellows)
Valve
Customer specified flangesInsert version for integration into the vacuum system (without body)
Ohter sealing materials (Chemraz, EPDM etc.)
Window in gate: with seal made of VITON, exchangeable
Special valve gate, suitable to install various foils of orifices
Gate valve for gas analysis
With by-pass valves for gas analysis at high pressures
Gate valve with protective ring (see series 17)