The compact mini UHV gate valve featuring a modular actuator concept is well suited for industrial and R&D applications. It is often used in pipings of semiconductor process systems.
Specifications Table
Series Number
010
Series Name
Mini UHV Gate Valve
Description
Mini-UHV-gate valve. General purpose valve for isolation in UHV or other demanding applications. Free of lubricants. Low particle generation. Low shock. Vulcanized gate seal.
Actuator Types
Manual actuator (hand wheel), Pneumatic actuator (double acting), Pneumatic actuator (single achting with closing spring NC)
Sealing Technology
MONOVAT-System
Sealing Gate
FKM (VITON®)
Sealing Bonnet
Metal
Feedthrough
Bellows
Leak Rate - Body
< 5 . 10-10 mbar ls-1
Leak Rate - Seat
< 1 . 10-9 mbar ls-1
Nominal inside diameters (ID) in mm (inches)
16 (5/8") - 50 (2")
Body material
Stainless steel
Dimensional Drawings
Actuator
Solenoid for impulse actuation: actual valve position is maintained at power failure
Solenoid separate, for external mounting
Solenoid for 12, 48 V DC
Solenoid for 24, 48, 100, 115, 200, 230 V / 50 Hz
Solenoid for 24, 100, 115, 200, 230 V / 60 Hz
Manual emergency operation on solenoid lockable
Manual actuator with position indicator
Position indicator for 200°C with connecting cable 0.3 m contact rating: 1A / 48V AC, 1A / 72V DC
Pneumatic actuator, single acting with opening spring (NO)
Version for 1 mio cycles (special bellows)
Valve
Customer specified flanges
Insert version for integration into the vacuum system (without body)
Ohter sealing materials (Chemraz, EPDM etc.)
Window in gate: with seal made of VITON, exchangeable
Special valve gate, suitable to install various foils of orifices
Gate valve for gas analysis
With by-pass valves for gas analysis at high pressures
Gate valve with protective ring (see series 17)