HV Gate Valve with Bellows (Series 110)

General purpose valve for isolation in high vacuum systems. Especially suited to pump isolation

Specifications Table

Series Number	110
Series Name	HV Gate Valve with Bellows
Description	General purpose valve for isolation in high vacuum systems. Especially suited to pump isolation.
Actuator Types	3-position pneumatic actuator, Manual actuator (hand wheel), Pneumatic actuator (double acting)
Sealing Technology	VATLOCK-System
Sealing Gate	FKM (VITON®)
Sealing Bonnet	FKM (VITON®)
Feedthrough	Bellows
Leak Rate - Body	< 1 . 10-9 mbar ls-1
Leak Rate - Seat	< 1 . 10-9 mbar ls-1
Nominal inside diameters (ID) in mm (inches)	63 (2 1/2") - 320 (12")
Body material	Stainless steel

Dimensional Drawings

Valve

Customer specific flanges with / without watercooling
Other sealing materials
Ports for roughing (by-pass), venting, purging or for gauges: possible with positions A and B
O-Ring seal in gate (Dia.1) with DN63, 100, 160, 200 instead of the vulcanized seal

Actuator

Solenoid valve for impulse actuation: last valve position is maintained at power failure
Solenoid valve separate, for external mounting
Other solenoid valve voltage (standard 24 VDC)
Manual emergency operation on solenoid valve lockable
Double position indicator (2 switches each for the positions "open" and "closed")
Position indicator with change-over contact

Valve

Special gate for the installation of various foils
Window in gate (Dia 3) with DN 63, 100, 160, 200