New Version Pendulum Valve (Series 162)
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For demanding semiconductor processes such as CVD and ETCH.
Specifications Table
| Series Number | 162 |
|---|---|
| Series Name | New Version Pendulum Valve |
| Description | For applications requiring a compact design. Especially suited to demanding corrosive processes. |
| Actuator Types | Pneumatic actuator (single achting with closing spring NC) |
| Sealing Technology | SEALRING-System |
| Sealing Gate | FKM (VITON®) |
| Sealing Bonnet | FKM (VITON®) |
| Feedthrough | Rotary feedthrough |
| Leak Rate - Body | < 1 . 10-8 mbar ls-1 |
| Leak Rate - Seat | < 1 . 10-8 mbar ls-1 |
| Nominal inside diameters (ID) in mm (inches) | 63 (2 1/2") - 400 (16") |
| Body material | Aluminum |
Dimensional Drawings
Valve
Solenoid for 12, 24, 48 V DCSolenoid for 24, 48, 100, 115, 200, 230 V 50/50 Hz
Solenoid separate for external mounting
Ports for roughing (by-pass), venting or gauges
Splinter shield
Heating
Heater including insulation box and over temperature switch (80°C, 100°C, 120°C)Valve
Other sealing materialsCustomer specific flanges
Actuator
Actuator side B2 (standard B1)Valve
Hard anodized aluminum or nickel-platedSolenoid for impulse actuation (actual valve position is maintained at power failure)