For demanding semiconductor processes such as CVD and ETCH.
Specifications Table
Series Number
162
Series Name
New Version Pendulum Valve
Description
For applications requiring a compact design.
Especially suited to demanding corrosive processes.
Actuator Types
Pneumatic actuator (single achting with closing spring NC)
Sealing Technology
SEALRING-System
Sealing Gate
FKM (VITON®)
Sealing Bonnet
FKM (VITON®)
Feedthrough
Rotary feedthrough
Leak Rate - Body
< 1 . 10-8 mbar ls-1
Leak Rate - Seat
< 1 . 10-8 mbar ls-1
Nominal inside diameters (ID) in mm (inches)
63 (2 1/2") - 400 (16")
Body material
Aluminum
Dimensional Drawings
Valve
Solenoid for 12, 24, 48 V DC
Solenoid for 24, 48, 100, 115, 200, 230 V 50/50 Hz
Solenoid separate for external mounting
Ports for roughing (by-pass), venting or gauges
Splinter shield
Heating
Heater including insulation box and over temperature switch (80°C, 100°C, 120°C)
Valve
Other sealing materials
Customer specific flanges
Actuator
Actuator side B2 (standard B1)
Valve
Hard anodized aluminum or nickel-plated
Solenoid for impulse actuation (actual valve position is maintained at power failure)
Actuator
3-position pneumatic actuator throttling
Gate
Gate with window
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