Vacuum Valves > VAT Valves > Gate Valves, Pendulum Valves, Vatterfly Valves
Solenoid for 24, 48, 100, 115, 200, 230 V 50/50 Hz
Solenoid separate for external mounting
Ports for roughing (by-pass), venting or gauges
Splinter shield
Customer specific flanges
Solenoid for impulse actuation (actual valve position is maintained at power failure)
New Version Pendulum Valve (Series 162)
For demanding semiconductor processes such as CVD and ETCH.
Specifications Table
| Series Number | 162 |
| Series Name | New Version Pendulum Valve |
| Description | The new pendulum valves are the successors of the previous Series 165 valves. The series 16.2 is designed for demanding corrosive processes such as CVD and ETCH. Although featuring the same proved sealing principle and quality as the previous types, they are lower-priced. Further features are low particle count and quick and easy cleaning. |
| Actuator Types | Pneumatic actuator (single achting with closing spring NC) |
| Sealing Technology | SEALRING-System |
| Sealing Gate | FKM (VITON®) |
| Sealing Bonnet | FKM (VITON®) |
| Feedthrough | Rotary feedthrough |
| Leak Rate - Body | < 1 . 10-8 mbar ls-1 |
| Leak Rate - Seat | < 1 . 10-8 mbar ls-1 |
| Nominal inside diameters (ID) in mm (inches) | 63 (2 1/2") - 400 (16") |
| Body material | Aluminum |
Dimensional Drawings
Valve
Solenoid for 12, 24, 48 V DCSolenoid for 24, 48, 100, 115, 200, 230 V 50/50 Hz
Solenoid separate for external mounting
Ports for roughing (by-pass), venting or gauges
Splinter shield
Heating
Heater including insulation box and over temperature switch (80°C, 100°C, 120°C)Valve
Other sealing materialsCustomer specific flanges
Actuator
Actuator side B2 (standard B1)Valve
Hard anodized aluminum or nickel-platedSolenoid for impulse actuation (actual valve position is maintained at power failure)