Butterfly with Sealing Function (Series 615)

Semiconductors, FPD and industrial processes, particularly CVD systems.

Specifications Table

Series Number	615
Series Name	Butterfly with Sealing Function
Description	Downstream pressure control and isolation valve Compact design Fast operation High-performance, integrated controller Low minimum controllable conductance
Actuator Types
Sealing Technology	Rotary feedthrough (double seal)
Sealing Gate	FKM (VITON®)
Sealing Bonnet	none
Feedthrough	Rotary feedthrough (double seal)
Leak Rate - Body	< 1 . 10-9 mbar ls-1
Leak Rate - Seat	< 1 . 10-9 mbar ls-1
Nominal inside diameters (ID) in mm (inches)	40 (1 1/2") - 100 (4" )
Body material	Aluminium hard anodized; Stainless steel

Dimensional Drawings

Legend

* - XY double excentric bearing prevents wearing of the O-ring and particle generation
1 - controller
2 - coupling
3 - bearing
4 - double seal
5 - plate
6 - body

Actuator

Ultra fast actuator (90 ms)
Controller with configurable PI parameters
RS232 interface with 2 analog outputs
Ethernet interface
DeviceNet interface
Logic interface
Profibus interface
RS-485 interface
CC-Link interface
EtherCAT interface
SPS = ± 15V DC Sensor Power Supply at power failure)
PFO = Power Failure Option (valve closes or opens automatically

Valve

Diameter Nominal: DN 40 / 50 with ISO-KF DN 63 / 80 / 100 with ISO-F
Other flanges (JIS, ASA-LP, CF-F)
Customer specified flanges
Aluminum hard anodized or nickel-plated
Other sealing materials
Heater with insulation for valve temperatures 80°C, 100°C, 120°C