HV Control Gate Valves (Series 642)
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Control and isolation valve for SEMI, FPD and industrial processes.
Optimal for sputtering and etching processes.
Specifications Table
| Series Number | 642 |
|---|---|
| Series Name | HV Control Gate Valves |
| Description | HV Control gate valves with stepper motor for controlling and isolation. |
| Actuator Types | Stepper motor |
| Sealing Technology | VATLOCK-System |
| Sealing Gate | FKM (VITON®) |
| Sealing Bonnet | FKM (VITON®) |
| Feedthrough | Rotary feedthrough |
| Leak Rate - Body | < 1 . 10-9 mbar ls-1 |
| Leak Rate - Seat | < 1 . 10-9 mbar ls-1 |
| Nominal inside diameters (ID) in mm (inches) | 100 (4") - 400 (16") |
| Body material | Stainless steel |
Dimensional Drawings
Actuator
Acutator rotated by 90° / 180° to position 2 or 3 (position 1 is standard).Actuator on B-side (A-side is standard)
Stepper motor for vertical mounting position DN 400 (closing timer 15 s, cycles until first service 50'000)
Solenoids for impulse actuation: actual valve position is maintained at power failure
Solenoid seperate, for external mounting
Solenoid for 12, 48 V DC
Solenoid for 24, 48, 100, 115, 200, 220 V / 50 Hz
Solenoid for 24, 100, 115, 200, 220 V / 60 Hz
Valve
Sizes DN 63 and 80 on requestCustomer specified flanges
For direct mounting to flat chamber
Other sealing materials
Watercooled or water heated flanges
Rotary feedthrough with pump port
Ports for roughing (bypass), venting or for gauges