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All Vacuum Products > Vacuum Valves > VAT Valves > Control Valves

VAT UHV Control Gate Valve (Series 648)



For ordering information for this series, please contact our sales team:

Phone: 800-245-1656
Email: salesus@lesker.com
Control and isolation valve for SEMI, FPD and industrial processes. Optimal for sputtering and etching processes.

Specifications Table

Series Number 648
Series Name UHV Control Gate Valve
Description UHV GATE CONTROL VALVE,
Actuator Types Stepper motor
Sealing Technology VATLOCK-System
Sealing Gate FKM (VITON®)
Sealing Bonnet Metal
Feedthrough Bellows
Leak Rate - Body < 1 . 10-10 mbar ls-1
Leak Rate - Seat < 1 . 10-9 mbar ls-1


Dimensional Drawings


Legend - Seat
1 - Gate
2 - Counter-Plate
3 - Leaf Spring
4 - Ball pairs
5 - Ball detents
6 - Gate seal
7 - Spring stop
Contact Us - VAT Valves: UHV Control gate valve