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Control and isolation valve for SEMI, FPD and industrial processes.
Optimal for sputtering and etching processes.
Specifications Table
| Series Number |
648 |
| Series Name |
UHV Control Gate Valve |
| Description |
UHV GATE CONTROL VALVE, |
| Actuator Types |
Stepper motor |
| Sealing Technology |
VATLOCK-System |
| Sealing Gate |
FKM (VITON®) |
| Sealing Bonnet |
Metal |
| Feedthrough |
Bellows |
| Leak Rate - Body |
< 1 . 10-10 mbar ls-1 |
| Leak Rate - Seat |
< 1 . 10-9 mbar ls-1 |
Dimensional Drawings
UHV Control Gate Valve (Series 648)
