Control Pendulum Valve (Series 650)

Optimized for corrosive semiconductor and FPD processes (e. g. etching) and for cleaning processes between deposition processes. In control mode, the valve works virtually particle-free. Maintenance can be done easy and fast .

Specifications Table

Series Number	650
Series Name	Control Pendulum Valve
Description	Pressure control and isolation valves with pendulum plate for downstream applications. Compact design. Fast, virtually particle-free and shock-free operation. Powerful integrated controller.
Actuator Types	Stepper motor, integrated controller
Sealing Technology	SEALRING-System
Sealing Gate	FKM (VITON®)
Sealing Bonnet	FKM (VITON®)
Feedthrough	Rotary feedthrough (actuator), Shaft feedthrough (sealing ring)
Leak Rate - Body	< 1 . 10-9 mbar ls-1
Leak Rate - Seat	< 1 . 10-9 mbar ls-1
Nominal inside diameters (ID) in mm (inches)	63 (2 1/2") - 400 (16")
Body material	Aluminium hard anodized; Aluminium nickelled; Aluminum

Dimensional Drawings

Actuator

Actuator B2
Controller with configurable PI parameters
RS232 interface with 2 analog outputs
Ethernet interface

Valve

Other sizes (e. g. DN 80)
Other flange types (e. g. ASA-LP)
Customer specified flanges (e. g. rectangular flange for direct mounting to chamber)
Other sealing materials
Other surface processings (e. g. nickel-plating)
KF ports on the body
Heater with insulation for valve temperatures 80°C, 100°C, 120°C
Controllers for operating several valves synchronously
Control valve only (no leaktight closing)
Wedge-shaped pendulum plate for smaller controllable conductances