Pendulum Valve Control System (Series 651)

Optimized for corrosive semiconductor and FPD processes (e. g. etching) and for cleaning processes between deposition processes. In control mode, the valve works virtually particle-free. Maintenance can be done easy and fast .

Specifications Table

Series Number	651
Series Name	Pendulum Valve Control System
Description	Pressure control and isolation valves with extended control range, based on the pendulum principle. For downstream applications. Compared to Series 650, Series 651 achieves considerably shorter pressure rise times at low gas flows. Compact design. Fast, virtually particle-free and shock-free operation. Powerful integrated controller.
Actuator Types	Stepper motor, integrated controller
Sealing Technology	SEALRING-System
Sealing Gate	FKM (VITON®)
Sealing Bonnet	FKM (VITON®)
Feedthrough	Rotary feedthrough (actuator), Shaft feedthrough (sealing ring)
Leak Rate - Body	< 1 . 10-9 mbar ls-1
Leak Rate - Seat	< 1 . 10-9 mbar ls-1
Nominal inside diameters (ID) in mm (inches)	160 (6") - 400 (16")
Body material	Aluminium hard anodized; Aluminium nickelled; Aluminum

Dimensional Drawings

Actuator

Actuator B2
Controller with configurable PI parameters
RS232 interface with 2 analog outputs
Ethernet interface

Valve

Other sizes (e. g. DN 80)
Other flange types (e. g. ASA-LP)
Customer specified flanges (e. g. rectangular flange for direct mounting to chamber)
Other sealing materials
Other surface processings (e. g. nickel-plating)
KF ports on the body
Heater with insulation for valve temperatures 80°C, 100°C, 120°C
Controllers for operating several valves synchronously
Control valve only (no leaktight closing)
Wedge-shaped pendulum plate for smaller controllable conductances