Optimized for corrosive semiconductor and FPD processes (e. g. etching) and for cleaning processes between deposition processes. In control mode, the valve works virtually particle-free. Maintenance can be done easy and fast. An advantage is the extended control range.
| Series Number |
652 |
| Series Name |
Pendulum Valve Control System |
| Description |
Series 652
Downstream pressure control and
Isolation valve
Compact design
Very fast, virtually particle-free and
shock-free operation
High-performance, integrated controller |
| Actuator Types |
Stepper motor |
| Sealing Technology |
Rotary feedthrough (double seal) |
| Sealing Gate |
FKM (VITON®) |
| Sealing Bonnet |
FKM (VITON®) |
| Feedthrough |
Rotary feedthrough |
| Leak Rate - Body |
< 1 . 10-9 mbar ls-1 |
| Leak Rate - Seat |
< 1 . 10-9 mbar ls-1 |
| Nominal inside diameters (ID) in mm (inches) |
200 (8") - 250 (10") |
| Body material |
Aluminum |
Pendulum Valve Control System (Series 652)
