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All Vacuum Products > Vacuum Valves > VAT Valves > Control Valves

VAT Control Pendulum Valve (Series 655)



For ordering information for this series, please contact our sales team:

Phone: 800-245-1656
Email: salesus@lesker.com
Downstream pressure control and isolation valve for SEMI and FPD processes. Optimal for corrosive etching and cleaning processes.

Specifications Table

Series Number 655
Series Name Control Pendulum Valve
Description PENDULUM CONTROL VALVE, SERIES 65.5
Actuator Types Stepper motor
Sealing Technology Rotary feedthrough (double seal)
Sealing Gate FKM (VITON®)
Sealing Bonnet FKM (VITON®)
Feedthrough Rotary feedthrough
Leak Rate - Body < 1 . 10-9 mbar ls-1
Leak Rate - Seat < 1 . 10-8 mbar ls-1


Dimensional Drawings


Legend - Valve Seat Side
1 - Gate
2 - Actuator Shaft
3 - Two-Axis Actuator
4 - Actuator Feedthrough Seal
5 - Gate Seal
Contact Us - VAT Valves: Control pendulum valve