Control Pendulum Valve (Series 655)

Downstream pressure control and isolation valve for SEMI and FPD processes. Optimal for corrosive etching and cleaning processes.

Specifications Table

Series Number	655
Series Name	Control Pendulum Valve
Description	PENDULUM CONTROL VALVE, SERIES 65.5
Actuator Types	Stepper motor
Sealing Technology	Rotary feedthrough (double seal)
Sealing Gate	FKM (VITON®)
Sealing Bonnet	FKM (VITON®)
Feedthrough	Rotary feedthrough
Leak Rate - Body	< 1 . 10-9 mbar ls-1
Leak Rate - Seat	< 1 . 10-8 mbar ls-1

Dimensional Drawings