Vacuum Valves > VAT Valves > Transfer Valves and Doors for Semi
High speed venting valve for fast closing and opening times
Pressure control for the closed valve position
Bakeable to 150°C
Manual mechanical locking
Solenoid for impulse actuation 12 / 24 VDC, 115 / 230 V 50 / 60Hz
Bellows feedthrough with optimized particle protection
Bellows feedthrough with detachable convolutions and optimized particle protection
Different opening sizes: - 51 x 160 / 210 / 265 / 420 (designation 01 / 02 / 03 / 04)
Different opening sizes: - Other opening sizes on request, max. 56 x 700 mm; 100 x 500mm
Body flange: - Sealing surface or groove with O-ring
Body flange: - Sealing materials (O-ring): FKM, FFKM
Body flange: - Metal seal (for stainless steel)
Body flange: - Other sealing materials on request
Body flange: - Bolt pattern outside or inside of the sealing line
Body flange: - Alignment pins, alignment holes
Surface treatments: - Aluminum: hard anodized or nickel-plated
Surface treatments: - Aluminum / stainless steel: ball-polished
UHV version: - Sealing surface for metal flange seal
UHV version: - Metal seal on bonnet flange
Temperature management: - Valve body prepared for: liquid cooling (stainless steel) / nitrogen purge / heating cartridges
Temperature management: - Heating cartridges with or without thermocouple
Temperature management: - PTC heating cartridges
Temperature management: - Temperature sensors with/without overtemp. protection
High speed closing for the conneciton valve body/botnnet flange (dismounting/mounting of actuator/gate unit)
Port KF16 for bypass, venting or gauges
Valve body prepared for customer-specific sensor systems (pressure, temperature, wafer detection)
Sealing materials for vulcanized seals: - Other sealing materials on request
Gate with groove
Sealing material for gate O-ring: - FKM, FFKM
Sealing material for gate O-ring: - Other sealing materials on request
Surface treatment: - Aluminum: hard anodized or nickel-plated
Surface treatment: - Aluminum / stainless steel: ball-blasted or ball-polished
Surface treatment: - Stainless steel: electro polished
Protective shields against heat radiation / coating / plasma and process gases
Temperature management: - Liquid cooling (stainless steel)
Temperature management: - Gate with heating conductor
Double position indicators in both end positions
Mechanical and electronic magnetic flied sensors with LED
Cycle counter
Transfer Valve Monovat Direct (Series 022)
For load lock / process module isolation.
For 200mm, 300mm and 450mm semiconductor applications.
Specifications Table
| Series Number | 022 |
| Series Name | Transfer Valve Monovat Direct |
| Description | MONOVAT denotes a three-dimensional seal technology, which allows to close an open with a single motion. Despite the very short opening and closing time it is possible to reach lowest value for the particle and shock generation. The extremely compact and maintenance-free drive covers the entire area, which is required in the semiconductor industry for load lock and process chamber insulation (200mm to 450mm). The exchange of the dynamic elastomer seal is very simple and without loose parts. In addition, the transfer valve MONOVAT supplemented with various options, such as heat shield, enclosure cooling, surface treatment and choice of elastomer seals (FKM, FFKM) |
| Actuator Types | Pneumatic actuator (double acting) |
| Sealing Technology | MONOVAT-System |
| Sealing Gate | FKM (VITON®) |
| Sealing Bonnet | FKM (VITON®) |
| Feedthrough | Bellows |
| Leak Rate - Body | < 1 . 10-9 mbar ls-1 |
| Leak Rate - Seat | < 1 . 10-9 mbar ls-1 |
| Nominal inside diameters (ID) in mm (inches) | 32x222 (1.25"x8.75") - 56x496 (2,2"x19,53") |
| Body material | Aluminum; Stainless steel |
Dimensional Drawings
Actuator
Pneumatic locking in closed an open positionHigh speed venting valve for fast closing and opening times
Pressure control for the closed valve position
Bakeable to 150°C
Manual mechanical locking
Solenoid for impulse actuation 12 / 24 VDC, 115 / 230 V 50 / 60Hz
Bellows feedthrough with optimized particle protection
Bellows feedthrough with detachable convolutions and optimized particle protection
Valve
Different opening sizes: - 25 x 160 / 210 / 265 / 420 (designation 01 / 02 / 03 / 04)Different opening sizes: - 51 x 160 / 210 / 265 / 420 (designation 01 / 02 / 03 / 04)
Different opening sizes: - Other opening sizes on request, max. 56 x 700 mm; 100 x 500mm
Body flange: - Sealing surface or groove with O-ring
Body flange: - Sealing materials (O-ring): FKM, FFKM
Body flange: - Metal seal (for stainless steel)
Body flange: - Other sealing materials on request
Body flange: - Bolt pattern outside or inside of the sealing line
Body flange: - Alignment pins, alignment holes
Surface treatments: - Aluminum: hard anodized or nickel-plated
Surface treatments: - Aluminum / stainless steel: ball-polished
UHV version: - Sealing surface for metal flange seal
UHV version: - Metal seal on bonnet flange
Temperature management: - Valve body prepared for: liquid cooling (stainless steel) / nitrogen purge / heating cartridges
Temperature management: - Heating cartridges with or without thermocouple
Temperature management: - PTC heating cartridges
Temperature management: - Temperature sensors with/without overtemp. protection
High speed closing for the conneciton valve body/botnnet flange (dismounting/mounting of actuator/gate unit)
Port KF16 for bypass, venting or gauges
Valve body prepared for customer-specific sensor systems (pressure, temperature, wafer detection)
Gate
Sealing materials for vulcanized seals: - FKM, FFKMSealing materials for vulcanized seals: - Other sealing materials on request
Gate with groove
Sealing material for gate O-ring: - FKM, FFKM
Sealing material for gate O-ring: - Other sealing materials on request
Surface treatment: - Aluminum: hard anodized or nickel-plated
Surface treatment: - Aluminum / stainless steel: ball-blasted or ball-polished
Surface treatment: - Stainless steel: electro polished
Protective shields against heat radiation / coating / plasma and process gases
Temperature management: - Liquid cooling (stainless steel)
Temperature management: - Gate with heating conductor
Position indicator
Bakeable to 150°CDouble position indicators in both end positions
Mechanical and electronic magnetic flied sensors with LED
Cycle counter