Vacuum Valves > VAT Valves > Transfer Valves and Doors for Semiconductors
Other solenoid valve voltage (standard 24VDC)
Bakeable to 150 °C
Double position indicator for the positions OPEN and CLOSED
Surface: Aluminum, ball-polished stainless steel
Surface: Electro-polished stainless steel gate
Temperature management: Body prepared for heating cartridges
Temperature management: PTC or resistance heating cartridges
FFKM gate seal (other sealing materials on request)
Protective shield for gate (protection against coating, plasma and process gases, heat radiation)
Surface: Aluminum, ball-polished stainless steel
Surface: Electro-polished stainless steel gate
FFKM gate seal (other sealing materials on request)
Protective shield for gate (protection against coating, plasma and process gases, heat radiation)
Body flange: (Viton®) or FFKM body seal (O-ring)
Body flange: Metal body seal (stainless steel version)
Body flange: Screw holes outside or inside of the sealing line
Body flange: Centering pins, centering holes
Body: Tabs made of stainless steel with vulcanized ZALAK 5100 (B-side only)
Transfer Valve Monovat Direct (Series 022)
For load lock and process chamber isolation in semiconductor production systems for
200, 300 and 450 mm wafers.
- Protected bellows
- Long life time
- locked pneumatically (option)
- easy gate exchange
Specifications Table
| Series Number | 022 |
| Series Name | Transfer Valve Monovat Direct |
| Description | For load lock and process chamber isolation in semiconductor production systems for 200, 300 and 450 mm wafers. |
| Actuator Types | Pneumatic actuator (double acting) |
| Sealing Technology | MONOVAT-System |
| Sealing Gate | FKM (VITON®) |
| Sealing Bonnet | FKM (VITON®) |
| Feedthrough | Bellows |
| Leak Rate - Body | < 1 . 10-9 mbar ls-1 |
| Leak Rate - Seat | < 1 . 10-9 mbar ls-1 |
| Nominal inside diameters (ID) in mm (inches) | 32x222 (1.26"x8.75") - 56x496 (2.20"x19.53") |
| Body material | Aluminum; Stainless steel |
Dimensional Drawings
Actuator
Pneumatically locked in closed and open position (check valve)Other solenoid valve voltage (standard 24VDC)
Bakeable to 150 °C
Double position indicator for the positions OPEN and CLOSED
Valve
Surface: Hard anodised or nickel-plated aluminumSurface: Aluminum, ball-polished stainless steel
Surface: Electro-polished stainless steel gate
Temperature management: Body prepared for heating cartridges
Temperature management: PTC or resistance heating cartridges
FFKM gate seal (other sealing materials on request)
Protective shield for gate (protection against coating, plasma and process gases, heat radiation)
Insert
Surface: Hard anodised or nickel-plated aluminumSurface: Aluminum, ball-polished stainless steel
Surface: Electro-polished stainless steel gate
FFKM gate seal (other sealing materials on request)
Protective shield for gate (protection against coating, plasma and process gases, heat radiation)
Valve
Body flange: Sealing surface or groove for O-ring sealBody flange: (Viton®) or FFKM body seal (O-ring)
Body flange: Metal body seal (stainless steel version)
Body flange: Screw holes outside or inside of the sealing line
Body flange: Centering pins, centering holes
Body: Tabs made of stainless steel with vulcanized ZALAK 5100 (B-side only)