Transfer Valve Monovat Direct (Series 022)

For load lock and process chamber isolation in semiconductor production systems for 200, 300 and 450 mm wafers. - Protected bellows - Long life time - locked pneumatically (option) - easy gate exchange

Specifications Table

Series Number	022
Series Name	Transfer Valve Monovat Direct
Description	For load lock and process chamber isolation in semiconductor production systems for 200, 300 and 450 mm wafers.
Actuator Types	Pneumatic actuator (double acting)
Sealing Technology	MONOVAT-System
Sealing Gate	FKM (VITON®)
Sealing Bonnet	FKM (VITON®)
Feedthrough	Bellows
Leak Rate - Body	< 1 . 10-9 mbar ls-1
Leak Rate - Seat	< 1 . 10-9 mbar ls-1
Nominal inside diameters (ID) in mm (inches)	32x222 (1.26"x8.75") - 56x496 (2.20"x19.53")
Body material	Aluminum; Stainless steel

Dimensional Drawings

Actuator

Pneumatically locked in closed and open position (check valve)
Other solenoid valve voltage (standard 24VDC)
Bakeable to 150 °C
Double position indicator for the positions OPEN and CLOSED

Valve

Surface: Hard anodised or nickel-plated aluminum
Surface: Aluminum, ball-polished stainless steel
Surface: Electro-polished stainless steel gate
Temperature management: Body prepared for heating cartridges
Temperature management: PTC or resistance heating cartridges
FFKM gate seal (other sealing materials on request)
Protective shield for gate (protection against coating, plasma and process gases, heat radiation)

Insert

Surface: Hard anodised or nickel-plated aluminum
Surface: Aluminum, ball-polished stainless steel
Surface: Electro-polished stainless steel gate
FFKM gate seal (other sealing materials on request)
Protective shield for gate (protection against coating, plasma and process gases, heat radiation)

Valve

Body flange: Sealing surface or groove for O-ring seal
Body flange: (Viton®) or FFKM body seal (O-ring)
Body flange: Metal body seal (stainless steel version)
Body flange: Screw holes outside or inside of the sealing line
Body flange: Centering pins, centering holes
Body: Tabs made of stainless steel with vulcanized ZALAK 5100 (B-side only)