Transfer Valve L-motion (Series 043)
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For load lock / process module isolation.
For 300mm and 450mm semiconductor applications.
Specifications Table
| Series Number | 043 |
|---|---|
| Series Name | Transfer Valve L-motion |
| Description | For load lock and process chamber isolation in semiconductor production systems. Especially suited for corrosive processes such as etch or CVD. |
| Actuator Types | Pneumatic actuator (double acting) |
| Sealing Technology | L-MOTION |
| Sealing Gate | FKM (VITON®) |
| Sealing Bonnet | FKM (VITON®) |
| Feedthrough | Bellows |
| Leak Rate - Body | < 1 . 10-9 mbar ls-1 |
| Leak Rate - Seat | < 1 . 10-9 mbar ls-1 |
| Nominal inside diameters (ID) in mm (inches) | 50x336 (1.97"x13.23") - 50x336 (1.97"x13.23") |
| Body material | Aluminum |
Dimensional Drawings
Valve
Other sealing materials, e.g. FFKM, VMQ, FVMQ gate sealO-ring seal in gate instead of the vulcanized seal (standard)
Heating and cooling equipment
Valve body stainless steel
Double position indicator