Atmospheric Door L-VAT (Series 075)
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Transfer door for load lock chambers. For applications under atmospheric pressure.
Specifications Table
| Series Number | 075 |
|---|---|
| Series Name | Atmospheric Door L-VAT |
| Description | For load lock and process chamber isolation on the atmospheric side of semiconductor production systems. |
| Actuator Types | Pneumatic actuator (double acting) |
| Sealing Technology | L-VAT |
| Sealing Gate | FKM (VITON®) |
| Sealing Bonnet | none |
| Feedthrough | Shaft feedthrough |
| Nominal inside diameters (ID) in mm (inches) | special - 50x336 (1.97"x13.23") |
| Body material | Aluminum; Stainless steel |
Dimensional Drawings
Actuator
Actuator cover kit to cover the pistons and cylinders of the gate pressure barDoor
Other sealing materials, e.g. FFKM, VMQ, FVMO gate sealO-ring seal in gate instead of the vulcanized seal (standard)
Gate hard anodized or nickel-plated