Large Transfer Valve Monovat (Series 024)

For FPD production systems up to generation 6. Suitable for use in high vacuum environment, e.g. in vapor deposition systems for organic materials.

Specifications Table

Series Number	024
Series Name	Large Transfer Valve Monovat
Description	The key features of the Monovat valve technology are the proven three-dimensional sealing technology, low particle performance, compact and modular design enables easy upscaling. By a wide range of options like protection shield for gate, cooling system for gate and body, bellows feed through, vertical installation direction etc. the catalogue product can be flexible adjusted to customer specific applications.
Actuator Types	Pneumatic actuator (double acting)
Sealing Technology	MONOVAT-System
Sealing Gate	FKM (VITON®)
Sealing Bonnet	FKM (VITON®)
Feedthrough	Shaft feedthrough with intermediate pumping
Leak Rate - Body	< 1 . 10-9 mbar ls-1
Leak Rate - Seat	< 1 . 10-9 mbar ls-1
Nominal inside diameters (ID) in mm (inches)	special - special
Body material	Aluminum

Dimensional Drawings

Valve

Special opening sizes: On request
Entire valve placed in vacuum chamber
Costumer specified flanges: Groove with O-ring
Surface: aluminum hard anodized
Watercooling in body to cool the flange seals
Vertical mounting position

Actuator

Solenoid for impulse actuation 24 V DC, 12 V DC, 115V 50/60 Hz, 230 V 50/60
Bellows feedthrough

Position indicator

NPN - tpye

Gate

Gate shield for heat radiation or coating from process protection
Watercooling at gate to cool the gate seal
Variety of gate sealing materials