Rectangular Valve Flapvat (Series 068)

Transfer valve for large area coating systems e.g. architecture glass and photovoltaic panels/cells. The SolVAT transfer valve is used for load lock, transfer and process chamber isolation.

Specifications Table

Series Number	068
Series Name	Rectangular Valve Flapvat
Description	The FlapVAT transfer valve is offered for opening heights up to 100mm as a low-cost supplement to the SolVAT transfer valve. The applied valve technology is referred to as a flapper. Compared to other flapper valves the FlapVAT transfer valve has a long gate seal lifetime and is mechanically locked in the closed position. Optionally, it is also available in the version «differential pressure resistant in either direction».
Actuator Types	Pneumatic actuator (double acting)
Sealing Technology	FlapVAT-System
Sealing Gate	FKM (VITON®)
Sealing Bonnet	FKM (VITON®)
Feedthrough	Rotary feedthrough
Leak Rate - Body	< 1 . 10-7 mbar ls-1
Leak Rate - Seat	< 1 . 10-5 mbar ls-1
Nominal inside diameters (ID) in mm (inches)	special - special
Body material	Aluminum; Stainless steel

Dimensional Drawings

Valve

Costumer specified flanges: Groove with O-ring
Watercooling in body to cool the flange seals
Vertical mounting orientation
Resistant against 1 bar differential in opening direction
Other sealing materials

Actuator

Rotary feedthrough with pump port
Actuator with distance piece for temperature reduction

Position indicator

NPN - type

Gate

Gate shield for heat radiation or coating from process protection
Watercooling at gate to cool the gate seal

Insert

Integrated valve (Insert type)