Transfer door for Flat Panel Display and Thin Film Photovoltaic production systems.
The large L-VAT door is designed for use at atmospheric side of the in or out coming chamber (load lock) of a system.
Large Door L-VAT
The key features of the large L-VAT door technology are the real L-motion of the gate, low particle and shock performance, modular design enables easy up scaling and compact design. By a wide range of options like heating protection shield on gate, stainless steal gate etc. (see table options) the product can be flexible adjusted to specific requirements.
Pneumatic actuator (double acting)
Leak Rate - Seat
< 1 . 10-9 mbar ls-1
Aluminum; Stainless steel
Actuator cover kit to cover the pistons and cylinders of the gate pressure bar
Other sealing materials, e.g. FFKM, VMQ, FVMO gate seal
O-ring seal in gate instead of the vulcanized seal (standard)
Gate hard anodized or nickel-plated