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Gate shield for heat radiation or coating from process protection
Large Door L-vat (Series 075)
Transfer door for Flat Panel Display and Thin Film Photovoltaic production systems.
The large L-VAT door is designed for use at atmospheric side of the in or out coming chamber (load lock) of a system.
Specifications Table
| Series Number | 075 |
| Series Name | Large Door L-vat |
| Description | The key features of the large L-VAT door technology are the real L-motion of the gate, low particle and shock performance, modular design enables easy up scaling and compact design. By a wide range of options like heating protection shield on gate, stainless steal gate etc. (see table options) the product can be flexible adjusted to specific requirements. |
| Actuator Types | Pneumatic actuator (double acting) |
| Sealing Technology | L-VAT |
| Sealing Gate | FKM (VITON®) |
| Sealing Bonnet | none |
| Feedthrough | |
| Leak Rate - Body | |
| Leak Rate - Seat | < 1 . 10-9 mbar ls-1 |
| Nominal inside diameters (ID) in mm (inches) | |
| Body material | Aluminum; Stainless steel |
Dimensional Drawings
Door
Vertical mounting orientationGate
Various sealing materials for gate sealGate shield for heat radiation or coating from process protection