Transfer door for Flat Panel Display and Thin Film Photovoltaic production systems.
The large L-VAT door is designed for use at atmospheric side of the in or out coming chamber (load lock) of a system.
Specifications Table
Series Number
075
Series Name
Large Door L-VAT
Description
The key features of the large L-VAT door technology are the real L-motion of the gate, low particle and shock performance, modular design enables easy up scaling and compact design. By a wide range of options like heating protection shield on gate, stainless steal gate etc. (see table options) the product can be flexible adjusted to specific requirements.
Actuator Types
Pneumatic actuator (double acting)
Sealing Technology
L-VAT
Sealing Gate
FKM (VITON®)
Sealing Bonnet
none
Leak Rate - Seat
< 1 . 10-9 mbar ls-1
Body material
Aluminum; Stainless steel
Dimensional Drawings
Actuator
Actuator cover kit to cover the pistons and cylinders of the gate pressure bar
Door
Other sealing materials, e.g. FFKM, VMQ, FVMO gate seal
O-ring seal in gate instead of the vulcanized seal (standard)
Gate hard anodized or nickel-plated