Hv Angle Valve (Dn10 - 250) (Series 264)

Series 26 valves are bellows sealed and designed for high vacuum applications in pumping systems, semiconductor technology, research systems, etc.

Specifications Table

Series Number	264
Series Name	Hv Angle Valve (Dn10 - 250)
Description	High vacuum angle valves with bellows feedthrough. Modular design.
Actuator Types	Manual actuator (hand wheel removable), Electromagnetic actuator (single acting with closing spring NC, with control electronics), Pneumatic actuator (double acting), Pneumatic actuator (single achting with closing spring NC or opening spring NO)
Sealing Technology
Sealing Gate	FKM (VITON®)
Sealing Bonnet	FKM (VITON®)
Feedthrough	Bellows
Leak Rate - Body	< 1 . 10-9 mbar ls-1
Leak Rate - Seat	< 1 . 10-9 mbar ls-1
Nominal inside diameters (ID) in mm (inches)	10 (3/8") - 250 (10")
Body material	Aluminum; Stainless steel

Dimensional Drawings

Legend

▼ - Valve seat side
1 - Plate seal
2 - Bellows
3 - Bonnet seal

Actuator

DN10 - DN50: Solenoid with 12, 24, 48, 110 V DC
DN10 - DN50: Solenoid with 24, 48, 115, 220 - 230 V / 50 Hz
DN10 - DN50: Solenoid with 24, 48, 115, 220 - 230 V / 60 Hz
DN63 - DN250: Solenoid with 12, 24, 48, 110 V DC
DN63 - DN250: Solenoid with 24, 48, 100, 110 - 115, 200, 220 - 230 V / 50 Hz
DN63 - DN250: Solenoid with 24, 100, 110 - 115, 200, 220 - 230 V / 60 Hz
DN16 - 50: Pneumatic actuator with opening spring (NO)
Solenoid with manual emergency operation

Position indicator

Position indicator for 120°C
Position indicator for 150°C
Common conector 7-pins for position indicator and solenoid (up to 48 V only)

Valve

Other sealing materials
Body with CF-flanges