All Vacuum Products > Vacuum Valves > VAT Valves > Angle Valves, Diaphragm Valves
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DN10 - DN50: Solenoid with 24, 48, 115, 220 - 230 V / 50 Hz
DN10 - DN50: Solenoid with 24, 48, 115, 220 - 230 V / 60 Hz
DN63 - DN250: Solenoid with 12, 24, 48, 110 V DC
DN63 - DN250: Solenoid with 24, 48, 100, 110 - 115, 200, 220 - 230 V / 50 Hz
DN63 - DN250: Solenoid with 24, 100, 110 - 115, 200, 220 - 230 V / 60 Hz
DN16 - 50: Pneumatic actuator with opening spring (NO)
DN100 - 160: Other solenoid voltages on request
Solenoid with manual emergency operation
DN100 - 160: Solenoid 24 V DC
Various pneumatic plug-in connector
Position indicator for 150°C
Common conector 7-pins for position indicator and solenoid (up to 48 V only)
Body with CF-flanges
HV Angle Valve (Dn10 - 250) (Series 264)
Search Products in Series 264
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Series 26 valves are bellows sealed and designed for high vacuum applications in pumping systems, semiconductor technology, research systems, etc.
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Specifications Table
| Series Number | 264 |
| Series Name | HV Angle Valve (Dn10 - 250) |
| Description | For pumping and venting of HV systems. |
| Actuator Types | Manual actuator (hand wheel removable), Electromagnetic actuator (single acting with closing spring NC, with control electronics), Pneumatic actuator (double acting), Pneumatic actuator (single achting with closing spring NC or opening spring NO) |
| Sealing Gate | FKM (VITON®) |
| Sealing Bonnet | FKM (VITON®) |
| Feedthrough | Bellows |
| Leak Rate - Body | < 1 . 10-9 mbar ls-1 |
| Leak Rate - Seat | < 1 . 10-9 mbar ls-1 |
| Nominal inside diameters (ID) in mm (inches) | 10 (3/8") - 250 (10") |
| Body material | Aluminum; Stainless steel |
Dimensional Drawings
Actuator
DN10 - DN50: Solenoid with 12, 24, 48, 110 V DCDN10 - DN50: Solenoid with 24, 48, 115, 220 - 230 V / 50 Hz
DN10 - DN50: Solenoid with 24, 48, 115, 220 - 230 V / 60 Hz
DN63 - DN250: Solenoid with 12, 24, 48, 110 V DC
DN63 - DN250: Solenoid with 24, 48, 100, 110 - 115, 200, 220 - 230 V / 50 Hz
DN63 - DN250: Solenoid with 24, 100, 110 - 115, 200, 220 - 230 V / 60 Hz
DN16 - 50: Pneumatic actuator with opening spring (NO)
DN100 - 160: Other solenoid voltages on request
Solenoid with manual emergency operation
DN100 - 160: Solenoid 24 V DC
Various pneumatic plug-in connector
Position indicator
Position indicator for 120°CPosition indicator for 150°C
Common conector 7-pins for position indicator and solenoid (up to 48 V only)
Valve
Other sealing materialsBody with CF-flanges