Suited for most corrosive gases. Extremely low outgassing rate.
Specifications Table
Series Number
284
Series Name
UHV Angle Valve (Dn16, Dn40, Dn63)
Description
For pumping and venting of UHV systems when an extremely low outgassing rate is important. Extremly low outgassing rate. Resistant against high differential pressure. Stationary rotatable CF flange.
Actuator Types
Manual actuator (hand wheel), Pneumatic actuator (single achting with closing spring NC)
Sealing Gate
FKM (VITON®)
Sealing Bonnet
Metal
Feedthrough
Bellows
Leak Rate - Body
< 5 . 10-10 mbar ls-1
Leak Rate - Seat
< 1 . 10-9 mbar ls-1
Nominal inside diameters (ID) in mm (inches)
16 (5/8") - 63 (2 1/2")
Body material
Stainless steel
Dimensional Drawings
Actuator
Other solenoid valve voltage (standard 24 VDC)
Pneumatic actuator bakeable to 120 °C
Valve
CF Flanges
Other sealing materials
Customer specified bodies