Vacuum Valves > VAT Valves > Angle Valves, Diaphragm Valves
Pneumatic actuator bakeable to 120 °C
Other sealing materials
Customer specified bodies
UHV Angle Valve (Dn16, Dn40, Dn63) (Series 284)
Search Products in Series 284
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Suited for most corrosive gases. Extremely low outgassing rate.
Specifications Table
| Series Number | 284 |
| Series Name | UHV Angle Valve (Dn16, Dn40, Dn63) |
| Description | For pumping and venting of UHV systems when an extremely low outgassing rate is important. Extremly low outgassing rate. Resistant against high differential pressure. Stationary rotatable CF flange. |
| Actuator Types | Manual actuator (hand wheel), Pneumatic actuator (single achting with closing spring NC) |
| Sealing Gate | FKM (VITON®) |
| Sealing Bonnet | Metal |
| Feedthrough | Bellows |
| Leak Rate - Body | < 5 . 10-10 mbar ls-1 |
| Leak Rate - Seat | < 1 . 10-9 mbar ls-1 |
| Nominal inside diameters (ID) in mm (inches) | 16 (5/8") - 63 (2 1/2") |
| Body material | Stainless steel |
Dimensional Drawings
Actuator
Other solenoid valve voltage (standard 24 VDC)Pneumatic actuator bakeable to 120 °C
Valve
CF FlangesOther sealing materials
Customer specified bodies