Vacuum Valves > VAT Valves > Angle Valves, Diaphragm Valves
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Solenoid for 24, 48, 115, 220 - 230 V 50 Hz
Solenoid for 24, 48, 115, 220 - 230 V 60 Hz
Solenoid with manual emergency operation
Position indicator for 150°C
Mechanical position indicator (DN100 - 160)
Common 7-pole plug for position indicator and solenoid (up to 48V)
ISO-KF-, ISO-K flanges
Inline Valve with Soft-pump (Dn25 - 50; Dn80) (Series 291)
The main use of series 29 valves is in load lock applications.
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Specifications Table
| Series Number | 291 |
| Series Name | Inline Valve with Soft-pump (Dn25 - 50; Dn80) |
| Description | Offers reduced turbulence during initial pump down giving low particle count. |
| Actuator Types | Pneumatic actuator (single achting with closing spring NC) |
| Sealing Technology | |
| Sealing Gate | FKM (VITON®) |
| Sealing Bonnet | FKM (VITON®) |
| Feedthrough | Bellows, Shaft feedthrough |
| Leak Rate - Body | < 1 . 10-9 mbar ls-1 |
| Leak Rate - Seat | < 1 . 10-9 mbar ls-1 |
| Nominal inside diameters (ID) in mm (inches) | 25 (1") - 80 (3") |
| Body material | Aluminum; Stainless steel |
Dimensional Drawings
Actuator
Solenoid for 12, 24, 48, 110 V DCSolenoid for 24, 48, 115, 220 - 230 V 50 Hz
Solenoid for 24, 48, 115, 220 - 230 V 60 Hz
Solenoid with manual emergency operation
Position indicator
Position indicator for 120°CPosition indicator for 150°C
Mechanical position indicator (DN100 - 160)
Common 7-pole plug for position indicator and solenoid (up to 48V)
Valve
Other sealing materialsISO-KF-, ISO-K flanges