The main use of series 29 valves is in load lock applications.
Specifications Table
Series Number
292
Series Name
Angle Valve with Soft-pump (Dn100 - 160)
Description
For pumping and venting of HV systems when few turbulences, particles, substrate movements and condensation are important. Resistance against differential pressure. Setting of the orifice opening by means of a scale.
Actuator Types
Pneumatic actuator (double acting), Pneumatic actuator (single achting with closing spring NC)
Sealing Gate
FKM (VITON®)
Sealing Bonnet
FKM (VITON®)
Feedthrough
Bellows, Shaft feedthrough
Leak Rate - Body
< 1 . 10-9 mbar ls-1
Leak Rate - Seat
< 1 . 10-9 mbar ls-1
Nominal inside diameters (ID) in mm (inches)
100 (4") - 160 (6")
Body material
Aluminum; Stainless steel
Dimensional Drawings
Actuator
Other solenoid valve voltage (standard 24 VDC)
Bakeable position indicator: actuator bakeable to 120 °C
Valve
CF Flanges
Other sealing materials
Customer specified bodies
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