Angle Valve with Soft-pump (Dn100 - 160) (Series 292)
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The main use of series 29 valves is in load lock applications.
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Specifications Table
| Series Number | 292 |
|---|---|
| Series Name | Angle Valve with Soft-pump (Dn100 - 160) |
| Description | For pumping and venting of HV systems when few turbulences, particles, substrate movements and condensation are important. Resistance against differential pressure. Setting of the orifice opening by means of a scale. |
| Actuator Types | Pneumatic actuator (double acting), Pneumatic actuator (single achting with closing spring NC) |
| Sealing Gate | FKM (VITON®) |
| Sealing Bonnet | FKM (VITON®) |
| Feedthrough | Bellows, Shaft feedthrough |
| Leak Rate - Body | < 1 . 10-9 mbar ls-1 |
| Leak Rate - Seat | < 1 . 10-9 mbar ls-1 |
| Nominal inside diameters (ID) in mm (inches) | 100 (4") - 160 (6") |
| Body material | Aluminum; Stainless steel |
Dimensional Drawings
Actuator
Other solenoid valve voltage (standard 24 VDC)Bakeable position indicator: actuator bakeable to 120 °C
Valve
CF FlangesOther sealing materials
Customer specified bodies