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Vacuum Valves > VAT Valves > Transfer Valves and Doors for Semiconductors > Transfer Valve Monovat Direct Builder

VAT Transfer Valve Monovat Direct: 02210-AA44

Spare Parts:

PDF Manual (502.7 KB)

Specifications Table

Model 022
Inside Diameter (ID) in mm (inches) 46x236 (1,8"x9,3")
Flange side A DN; side B same as A
Body Material Aluminum
Actuator Pneumatic actuator with position indicator with solenoid valve double acting
Solenoid Yes
Position Indicator Yes
Pressure Min 1•10-9 mbar
Pressure Max 1.2 bar (abs)
Molecular flow conductance ls-1 3340.0
Max. differential pressure (closed position in bar) 1.2
Max. pressure on seat side during opening in bar 0.0
Valve body temperature max. in °C 150.0
Actuator temperature max. in °C 150.0
Position indicator temperature max. in °C 80.0
Weight in kg/lbs 10 / 22.05

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