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Vacuum Valves > VAT Valves > Transfer Valves and Doors for Semiconductors > Transfer Valve Monovat Direct Builder

VAT Transfer Valve Monovat Direct: 02213-AA24





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PDF Manual (502.7 KB)

Specifications Table

Inside Diameter (ID) in mm (inches) 56x496 (2,2"x19,53")
Flange side A DN; side B same as A
Body Material Aluminum
Actuator Pneumatic actuator with position indicator without solenoid valve double acting
Solenoid No
Position Indicator Yes
Pressure Min 1•10-9 mbar
Pressure Max 1.2 bar (abs)
Molecular flow conductance ls-1 9320.0
Max. differential pressure (closed position in bar) 1.2
Max. pressure on seat side during opening in bar 0.0
Valve body temperature max. in °C 150.0
Actuator temperature max. in °C 150.0
Position indicator temperature max. in °C 80.0
Weight in kg/lbs 17 / 37.48


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