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Vacuum Valves > VAT Valves > Transfer Valves and Doors for Semiconductors > Atmospheric Door L-VAT Builder

VAT Atmospheric Door L-VAT: 07510-UE44


Spare Parts:

Specifications Table

Inside Diameter (ID) in mm (inches) 46x236 (1,8"x9,3")
Flange door; same mounting surfaces
Body Material Stainless steel
Actuator Pneumatic actuator with position indicator with solenoid valve double acting
Solenoid Yes
Position Indicator Yes
Pressure Min 1•10-9 mbar
Pressure Max 1.0 bar (abs)
Molecular flow conductance ls-1 0.0
Max. differential pressure (closed position in bar) 1.0 / 0.1
Max. pressure on seat side during opening in bar 0.1
Valve body temperature max. in °C 200.0
Actuator temperature max. in °C 80.0
Position indicator temperature max. in °C 80.0
Weight in kg/lbs 6 / 13.23

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