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Pressure Control Overview

PLC Pirani ColdCathode CapacitanceManometers MassFlowController GAS 3 PositionValve

The diagram below displays Upstream. Critical components displayed in green.

The diagram below displays Downstream. Critical components displayed in green.

Pressure Control Overview

Pressure control in a vacuum system is a method by which the system pressure is maintained at a specific, often critical, point to perform a certain process or experiment. Pressure control is generally achieved through either upstream or downstream pressure control, or a combination of both methods. Throughout the industry, the usage of the terms "upstream" and "downstream" can vary among companies due how they view their process. To minimize confusion, we will think of upstream pressure control as the metered input of gas into the system and downstream pressure control as the throttling of flow through the pumping system. Automated upstream pressure control is typically achieved by use of a mass flow controller (MFC) while automated downstream control utilizes motorized throttling valves. Please note that these descriptions, as well as the details below, are summarized to reduce confusion and to provide a basic overview of pressure control. For further information, please contact us or visit our Tech Notes section.

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