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High Vacuum Systems
Compact, full-featured computer controlled PVD tool.
R&D, Pilot-production, and production tools.
Glancing Angle Deposition systems.
Ultra High Vacuum Systems
Ultra-High vacuum sputtering systems (10-10 Torr), with up to 15 cathodes. Electron Beam and thermal options available.
Combinatorial Materials Science tool, specifically designed for electron-beam or sputtering applications.
Glove Box Interfaced Systems
Glovebox integrated Sputtering, Electron Beam, Thermal, & Organic Evaporation Deposition.
Custom Deposition Systems
Customized solutions for pioneering applications such as TVAC/space simulation, Diamond Like coatings, etc.
Cluster Deposition Systems
Robotic sample transfer system with up to 10 process modules; Including PVD, ALD, Organics, PLD, CVD, etch; insitu analysis and glovebox options.
Linear batch coaters, and multi-substrate dome coaters for high-throughput applications.
KDF systems can be customized to cover mainstream silicon, emerging materials and flat panel display markets.
Atomic Layer Deposition Systems
Thermal Atomic Layer Deposition.
Thermal or Plasma-enhanced, load locked Atomic Layer Deposition System.
The Right System for Your Research
Power Your Application Research
Techniques That Drive Your Process
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