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Thin Films Systems
Thin Film Systems

High Vacuum Systems
NANO 36™

Compact, full-featured computer controlled PVD tool.

PRO Line PVD Series

R&D, Pilot-production, and production tools.

AXXIS

Glancing Angle Deposition systems.

Glove Box Interfaced Systems
NANO 36™

Compact, full-featured computer controlled PVD tool.

SPECTROS™ Series

Glovebox integrated Sputtering, Electron Beam, Thermal, & Organic Evaporation Deposition.

Cluster Deposition Systems
OCTOS™

Robotic sample transfer system with up to 10 process modules; Including PVD, ALD, Organics, PLD, CVD, etch; insitu analysis and glovebox options.

Ultra High Vacuum Systems
LAB Line

Ultra-High vacuum sputtering systems (10-10 Torr), with up to 15 cathodes. Electron Beam and thermal options available.

CMS Series

Combinatorial Materials Science tool, specifically designed for electron-beam or sputtering applications.

Production Systems
BATCH Coaters

Linear batch coaters, and multi-substrate dome coaters for high-throughput applications.

KDF In-Line Solutions

KDF systems can be customized to cover mainstream silicon, emerging materials and flat panel display markets.

KDF PECVD & DLC Coating Systems

KDF systems deliver decorative PVD and functional wear coatings at production scale.

Custom Deposition Systems
Custom Vacuum Systems

Customized solutions for pioneering applications such as TVAC/space simulation, Diamond Like coatings, etc.

Atomic Layer Deposition Systems
ALD150LE™

Thermal Atomic Layer Deposition.

ALD150LX™

Thermal or Plasma-enhanced, load locked Atomic Layer Deposition System.

Roll-to-Roll Modules
PRO Line Roll-to-Roll Module

Precision Roll-to-Roll Thin Film Deposition for Flexible Substrates

Application Specific Systems
QUANTA Series

PEROVSKITE Series

INDIUM Series

TSV/TGV Series

SPACE SIMULATION Series

The Right System for Your Research

The Right System for Your Research

Application Research
Application Research
Perovskite Thin Films for Photovoltaics & Electronics Superconducting Thin Films for Quantum Applications; Qubits & Josephson Junctions PVD of Magnetic Thin Films: Spintronics, GMR & TMR Thin Films & Heusler Alloys
Solid-State Lithium Thin Film Batteries Organic Electronics (OLEDs & OPVs) Reactive Sputtering Research PVD of Indium Bumps
Thin Film Deposition for Lift-Off Processes Thin Films for Medical Devices Thermal Vacuum Chamber (TVAC)
Power Your Application Research

Power Your Application Research

Techniques & Capabilities
Techniques & Capabilities
Electron Beam Evaporation Thermal Evaporation Magnetron Sputtering
Organic (Point Source) Evaporation ALD (Atomic Layer Deposition) Multi-Chamber
Glove Box Integration Pulsed Filtered Cathodic Arc Deposition HiPIMS
Techniques That Drive Your Process

Techniques That Drive Your Process

Thin Film Knowledge Base
Thin Film Knowledge Base
Magnetron Performance Optimization Guide Evaporation Process Notes by Material Vacuum Reference Tables Vacuum Technology Concepts Calculators & Conversion Tools Frequently Asked Questions Material Deposition Chart Vacuum Technical Information
System Service & Support
System Service & Support
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THIN FILM SOLUTIONS

High Vacuum Systems

High Vacuum Systems
Ultra High Vacuum Systems

Ultra High Vacuum Systems
Glove Box Interfaced Systems

Glove Box Interfaced Systems
Atomic Layer Deposition Systems

Atomic Layer Deposition Systems
Production Systems

Production Systems
Cluster Deposition Systems

Cluster Deposition Systems
Application Specific Systems

Application Specific Systems
Thermal Vacuum Chambers

Thermal Vacuum Chambers (TVAC)
Roll-to-Roll Modules

Roll-to-Roll Modules

AI-Ready, Powered by eKLipse

Our process equipment platforms are engineered for seamless integration with external AI tools, enabling real-time recipe optimization, predictive analytics, and remote decision-making. Powered by eKLipse software, each system ensures intelligent control with minimal complexity allowing you to scale efficiently in a data-driven environment.

Learn More About eKLipse AI-Ready Thin Film Deposition Systems

Application Research

Atomic Layer Deposition (ALD) ALD
Perovskite Thin Films for Photovoltaics & Electronics Perovskite Thin Films
Thin Films for Medical Devices Medical Devices
Solid-State Lithium Thin Film Batteries Lithium Batteries
Reactive Sputtering Research Reactive Sputtering
Superconducting Thin Films for Quantum Applications; Qubits & Josephson Junctions Josephson Junctions
Magnetic Thin Films: Spintronics, GMR & TMR Thin Films & Heusler Alloys Spintronics
Organic Electronics (OLEDs & OPVs) Organic Electronics
Physical Vapor Deposition (PVD) of Indium Bumps Indium Bumps
Thin Film Deposition for Lift-Off Processes Lift-Off Processes
Atomic Layer Deposition (ALD)
Atomic Layer Deposition (ALD)
Perovskite Thin Films for Photovoltaics & Electronics
Perovskite Thin Films for Photovoltaics & Electronics
Thin Films for Medical Devices
Thin Films for Medical Devices
Solid-State Lithium Thin Film Batteries
Solid-State Lithium Thin Film Batteries
Reactive Sputtering Research
Reactive Sputtering Research
Superconducting Thin Films for Quantum Applications; Qubits & Josephson Junctions
Superconducting Thin Films for Quantum Applications; Qubits & Josephson Junctions
Magnetic Thin Films: Spintronics, GMR & TMR Thin Films & Heusler Alloys
Magnetic Thin Films: Spintronics, GMR & TMR Thin Films & Heusler Alloys
Organic Electronics (OLEDs & OPVs)
Organic Electronics (OLEDs & OPVs)
Physical Vapor Deposition (PVD) of Indium Bumps
Physical Vapor Deposition (PVD) of Indium Bumps
Thin Film Deposition for Lift-Off Processes
Thin Film Deposition for Lift-Off Processes
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Contact Us - Process Equipment Division