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KJLC® Residual Gas Analyzers (RGA)

The KJLC Element is a cost-effective RGA with one of the lowest Minimum Detectable Partial Pressure (MDPP) on the market.

Features

  • 2.6x10-12 Torr Minimum Detectable Partial Pressure (MDPP) with FC and 1.5x10-14 Torr Minimum Detectable Partial Pressure (MDPP) with EM
  • 100 and 200 amu options
  • Pre-built LabVIEW Drivers available
  • Access to API commands for system integration

Applications

  • Leak detection
  • Pump-down and bake-out monitoring
  • Gas and contamination identification
  • Vacuum system diagnostics
  • Process monitoring and control
User Level Info RGA w/ FC RGA w/ EM
Source Type Open Ion Source Open Ion Source
Mass Ranges 1-100 amu
1-200 amu
1-100 amu
1-200 amu
Resolution - Peak Width (amu) at 10% of peak height 0.9 amu 0.9 amu
Sensitivity 3e-4 A/Torr 3e-4 A/Torr
Minimum Detectable Partial Pressure 2.6e-12 Torr
3.5e-12 mbar
1.5e-14 Torr
2e-14 mbar
Maximum Operating Pressure 5e-4 Torr
6.7e-4 mbar
5e-4 Torr
6.7e-4 mbar
Maximum Sensor Operating Temperature 200 °C
392 °F
150 °C
302 °F
Operating Temperature (electronics) 5 - 50 °C
41 - 122 °F
5 - 50 °C
41 - 122 °F
Bakeout Temperature (without electronics) 300 °C
572 °F
300 °C
572 °F
Zero Blast Interference at Mass 2 < 100 ppm < 100 ppm
Web Interface Communication Cat5e Ethernet Cat5e Ethernet
LabView Drivers available Yes Yes
API accessible Yes Yes
Power Input 20-30 VDC, 24 VDC typical 20-30 VDC, 24 VDC typical
Power Connection Latching, 4 pin DIN connector, internally isolated from system ground Latching, 4 pin DIN connector, internally isolated from system ground
Filament Options Tungsten
Yttria-Coated Iridium
Tungsten
Yttria-Coated Iridium
Sensor Length (vacuum side) 5.63 in
143 mm
7.82 in
193 mm
Electronics Dimensions, Length 6.69 in
170 mm
6.69 in
170 mm
Electronics Dimensions, Width 4.53 in
115.1 mm
4.53 in
115.1 mm
Electronics Dimensions, Height 4.79 in
121.7 mm
4.79 in
121.7 mm
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Residual Gas Analyzers (RGA) Training
Are you interested in training for you and your team? Please contact us for further details.
Product Downloads
Below is a list of available file downloads for this product.
KJLC Element RGA Operating Manual
KJLC Element RGA Datasheet.
Contact Us
Contact Us
To contact someone directly, please click here, or call +1 412 387 9200 to get in contact with your dedicated sales team.
Note:
  • An Extension Tube, Communication Cable and Hardware to connect the RGA to your chamber are included with the RGA. A Power Supply is not included.

Ordering Table

Reference Description Part Number Price In Stock Add To Cart Accessories
Reference Description Part Number Price In Stock Add To Cart Accessories
RGA, 100 AMU, Faraday Cup, Dual Yttria-coated Iridium Filaments, Standard I/O
RGA, KJLC, 100 AMU, FARADAY CUP, DUAL YTTRIA-COATED IRIDIUM FILAMENTS, STANDARD I/O ELE1FA000 P.O.R. In Stock
RGA, 100 AMU, Faraday Cup, Dual Yttria-coated Iridium Filaments, Extended I/O
RGA, KJLC, 100 AMU, FARADAY CUP, DUAL YTTRIA-COATED IRIDIUM FILAMENTS, EXTENDED I/O ELE1FA100 P.O.R. Contact KJLC for Availability
RGA, 100 AMU, Faraday Cup, Tungsten Filaments, Standard I/O
RGA, KJLC, 100 AMU, FARADAY CUP, TUNGSTEN FILAMENTS, STANDARD I/O ELE1FB000 P.O.R. Contact KJLC for Availability
RGA, 100 AMU, Faraday Cup, Tungsten Filaments, Extended I/O
RGA, KJLC, 100 AMU, FARADAY CUP, TUNGSTEN FILAMENTS, EXTENDED I/O ELE1FB100 P.O.R. Contact KJLC for Availability
RGA, 100 AMU, Faraday Cup / Electron Multiplier, Dual Yttria-coated Iridium Filaments, Standard I/O
RGA, KJLC, 100 AMU, FARADAY CUP / ELECTRON MULTIPLIER, DUAL YTTRIA-COATED IRIDIUM FILAMENTS, STANDARD I/O ELE1MA000 P.O.R. In Stock
RGA, 100 AMU, Faraday Cup / Electron Multiplier, Dual Yttria-coated Iridium Filaments, Extended I/O
RGA, KJLC, 100 AMU, FARADAY CUP / ELECTRON MULTIPLIER, DUAL YTTRIA-COATED IRIDIUM FILAMENTS, EXTENDED I/O ELE1MA100 P.O.R. Contact KJLC for Availability
RGA, 100 AMU, Faraday Cup / Electron Multiplier, Tungsten Filaments, Standard I/O
RGA, KJLC, 100 AMU, FARADAY CUP / ELECTRON MULTIPLIER, TUNGSTEN FILAMENTS, STANDARD I/O ELE1MB000 P.O.R. Contact KJLC for Availability
RGA, 100 AMU, Faraday Cup / Electron Multiplier, Tungsten Filaments, Extended I/O
RGA, KJLC, 100 AMU, FARADAY CUP / ELECTRON MULTIPLIER, TUNGSTEN FILAMENTS, EXTENDED I/O ELE1MB100 P.O.R. Contact KJLC for Availability
RGA, 200 AMU, Faraday Cup, Dual Yttria-coated Iridium Filaments, Standard I/O
RGA, KJLC, 200 AMU, FARADAY CUP, DUAL YTTRIA-COATED IRIDIUM FILAMENTS, STANDARD I/O ELE2FA000 P.O.R. In Stock
RGA, 200 AMU, Faraday Cup, Dual Yttria-coated Iridium Filaments, Extended I/O
RGA, KJLC, 200 AMU, FARADAY CUP, DUAL YTTRIA-COATED IRIDIUM FILAMENTS, EXTENDED I/O ELE2FA100 P.O.R. Contact KJLC for Availability
RGA, 200 AMU, Faraday Cup, Tungsten Filaments, Standard I/O
RGA, KJLC, 200 AMU, FARADAY CUP, TUNGSTEN FILAMENTS, STANDARD I/O ELE2FB000 P.O.R. Contact KJLC for Availability
RGA, 200 AMU, Faraday Cup, Tungsten Filaments, Extended I/O
RGA, KJLC, 200 AMU, FARADAY CUP, TUNGSTEN FILAMENTS, EXTENDED I/O ELE2FB100 P.O.R. Contact KJLC for Availability
RGA, 200 AMU, Faraday Cup / Electron Multiplier, Dual Yttria-coated Iridium Filaments, Standard I/O
RGA, KJLC, 200 AMU, FARADAY CUP / ELECTRON MULTIPLIER, DUAL YTTRIA-COATED IRIDIUM FILAMENTS, STANDARD I/O ELE2MA000 P.O.R. In Stock
RGA, 200 AMU, Faraday Cup / Electron Multiplier, Dual Yttria-coated Iridium Filaments, Extended I/O
RGA, KJLC, 200 AMU, FARADAY CUP / ELECTRON MULTIPLIER, DUAL YTTRIA-COATED IRIDIUM FILAMENTS, EXTENDED I/O ELE2MA100 P.O.R. Contact KJLC for Availability
RGA, 200 AMU, Faraday Cup / Electron Multiplier, Tungsten Filaments, Standard I/O
RGA, KJLC, 200 AMU, FARADAY CUP / ELECTRON MULTIPLIER, TUNGSTEN FILAMENTS, STANDARD I/O ELE2MB000 P.O.R. Contact KJLC for Availability
RGA, 200 AMU, Faraday Cup / Electron Multiplier, Tungsten Filaments, Extended I/O
RGA, KJLC, 200 AMU, FARADAY CUP / ELECTRON MULTIPLIER, TUNGSTEN FILAMENTS, EXTENDED I/O ELE2MB100 P.O.R. Contact KJLC for Availability
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Reference Description Part Number Price In Stock Add To Cart Accessories
Reference Description Part Number Price In Stock Add To Cart Accessories
RGA, 100 AMU, Faraday Cup, Dual Yttria-coated Iridium Filaments, Standard I/O
RGA, KJLC, 100 AMU, FARADAY CUP, DUAL YTTRIA-COATED IRIDIUM FILAMENTS, STANDARD I/O ELE1FA000 P.O.R. In Stock
RGA, 100 AMU, Faraday Cup, Dual Yttria-coated Iridium Filaments, Extended I/O
RGA, KJLC, 100 AMU, FARADAY CUP, DUAL YTTRIA-COATED IRIDIUM FILAMENTS, EXTENDED I/O ELE1FA100 P.O.R. Contact KJLC for Availability
RGA, 100 AMU, Faraday Cup, Tungsten Filaments, Standard I/O
RGA, KJLC, 100 AMU, FARADAY CUP, TUNGSTEN FILAMENTS, STANDARD I/O ELE1FB000 P.O.R. Contact KJLC for Availability
RGA, 100 AMU, Faraday Cup, Tungsten Filaments, Extended I/O
RGA, KJLC, 100 AMU, FARADAY CUP, TUNGSTEN FILAMENTS, EXTENDED I/O ELE1FB100 P.O.R. Contact KJLC for Availability
RGA, 100 AMU, Faraday Cup / Electron Multiplier, Dual Yttria-coated Iridium Filaments, Standard I/O
RGA, KJLC, 100 AMU, FARADAY CUP / ELECTRON MULTIPLIER, DUAL YTTRIA-COATED IRIDIUM FILAMENTS, STANDARD I/O ELE1MA000 P.O.R. In Stock
RGA, 100 AMU, Faraday Cup / Electron Multiplier, Dual Yttria-coated Iridium Filaments, Extended I/O
RGA, KJLC, 100 AMU, FARADAY CUP / ELECTRON MULTIPLIER, DUAL YTTRIA-COATED IRIDIUM FILAMENTS, EXTENDED I/O ELE1MA100 P.O.R. Contact KJLC for Availability
RGA, 100 AMU, Faraday Cup / Electron Multiplier, Tungsten Filaments, Standard I/O
RGA, KJLC, 100 AMU, FARADAY CUP / ELECTRON MULTIPLIER, TUNGSTEN FILAMENTS, STANDARD I/O ELE1MB000 P.O.R. Contact KJLC for Availability
RGA, 100 AMU, Faraday Cup / Electron Multiplier, Tungsten Filaments, Extended I/O
RGA, KJLC, 100 AMU, FARADAY CUP / ELECTRON MULTIPLIER, TUNGSTEN FILAMENTS, EXTENDED I/O ELE1MB100 P.O.R. Contact KJLC for Availability
RGA, 200 AMU, Faraday Cup, Dual Yttria-coated Iridium Filaments, Standard I/O
RGA, KJLC, 200 AMU, FARADAY CUP, DUAL YTTRIA-COATED IRIDIUM FILAMENTS, STANDARD I/O ELE2FA000 P.O.R. In Stock
RGA, 200 AMU, Faraday Cup, Dual Yttria-coated Iridium Filaments, Extended I/O
RGA, KJLC, 200 AMU, FARADAY CUP, DUAL YTTRIA-COATED IRIDIUM FILAMENTS, EXTENDED I/O ELE2FA100 P.O.R. Contact KJLC for Availability
RGA, 200 AMU, Faraday Cup, Tungsten Filaments, Standard I/O
RGA, KJLC, 200 AMU, FARADAY CUP, TUNGSTEN FILAMENTS, STANDARD I/O ELE2FB000 P.O.R. Contact KJLC for Availability
RGA, 200 AMU, Faraday Cup, Tungsten Filaments, Extended I/O
RGA, KJLC, 200 AMU, FARADAY CUP, TUNGSTEN FILAMENTS, EXTENDED I/O ELE2FB100 P.O.R. Contact KJLC for Availability
RGA, 200 AMU, Faraday Cup / Electron Multiplier, Dual Yttria-coated Iridium Filaments, Standard I/O
RGA, KJLC, 200 AMU, FARADAY CUP / ELECTRON MULTIPLIER, DUAL YTTRIA-COATED IRIDIUM FILAMENTS, STANDARD I/O ELE2MA000 P.O.R. In Stock
RGA, 200 AMU, Faraday Cup / Electron Multiplier, Dual Yttria-coated Iridium Filaments, Extended I/O
RGA, KJLC, 200 AMU, FARADAY CUP / ELECTRON MULTIPLIER, DUAL YTTRIA-COATED IRIDIUM FILAMENTS, EXTENDED I/O ELE2MA100 P.O.R. Contact KJLC for Availability
RGA, 200 AMU, Faraday Cup / Electron Multiplier, Tungsten Filaments, Standard I/O
RGA, KJLC, 200 AMU, FARADAY CUP / ELECTRON MULTIPLIER, TUNGSTEN FILAMENTS, STANDARD I/O ELE2MB000 P.O.R. Contact KJLC for Availability
RGA, 200 AMU, Faraday Cup / Electron Multiplier, Tungsten Filaments, Extended I/O
RGA, KJLC, 200 AMU, FARADAY CUP / ELECTRON MULTIPLIER, TUNGSTEN FILAMENTS, EXTENDED I/O ELE2MB100 P.O.R. Contact KJLC for Availability
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