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B72102010

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Specifications

Manufacturer	Edwards Vacuum
Model	STP603 / STP603C
Pumping Speeds	N2: 650 L/s H2: 550 L/s
Ultimate Pressure	ISO-F Flange 6.65 x 10^-8 hPA 6.65 x 10^-8 mbar 6.67 x 10^-6 Pa 5.00 x 10^-8 Torr
Max Foreline Pressure	1.33 x 10^-1 hPA 1.33 x 10^-1 mbar 13.3 Pa 1.00 x 10^-1 Torr
Cooling Method(s)	Method Forced Air Water
Foreline Flange	KF40
Inlet Flange	ISO160-F
Compression Ratio(s)	N2: 100000000 H2: 100000
Weight Lbs	68.2
Weight kg	31.0
Lubrication Type	Dry
Vacuum Range	High Vacuum (10^-4 - 10^-8 Torr)
Technology Type	Turbomolecular