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B72102020

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STP603 /
STP603C Series Manual
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Specifications

Manufacturer Edwards Vacuum
Model STP603 /
STP603C
Pumping Speeds
N2: 650 L/s
H2: 550 L/s
Ultimate Pressure
ISO-F Flange
6.65 x 10-8 hPA
6.65 x 10-8 mbar
6.67 x 10-6 Pa
5.00 x 10-8 Torr
Max Foreline Pressure 1.33 x 10-1 hPA
1.33 x 10-1 mbar
13.3 Pa
1.00 x 10-1 Torr
Cooling Method(s) Method
Forced Air
Water
Foreline Flange KF40
Inlet Flange ISO160-F
Compression Ratio(s) N2: 100000000
H2: 100000
Weight Lbs 68.2
Weight kg 31.0
Lubrication Type Dry
Vacuum Range High Vacuum (10-4 - 10-8 Torr)
Technology Type Turbomolecular
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