Specifications
Manufacturer |
Edwards Vacuum |
Model |
STPH451C |
Pumping Speeds |
N2: 450 L/s
H2: 300 L/s
|
Ultimate Pressure |
ConFlat Flange
1.33 x 10-9
hPA
1.33 x 10-9
mbar
1.33 x 10-7
Pa
1.00 x 10-9
Torr
|
Max Foreline Pressure |
6.67 hPA
6.67 mbar
666 Pa
5.00 Torr
|
Cooling Method(s)
|
Method
Forced Air
Water
|
Compression Ratio(s) |
N2: 100000000
He: 500000
H2: 20000
|