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PT3416007

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STPH451C Series Manual
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Specifications

Manufacturer Edwards Vacuum
Model STPH451C
Pumping Speeds
N2: 450 L/s
H2: 300 L/s
Ultimate Pressure
ISO-F Flange
1.33 x 10-9 hPA
1.33 x 10-9 mbar
1.33 x 10-7 Pa
1.00 x 10-9 Torr
Max Foreline Pressure 6.67 hPA
6.67 mbar
666 Pa
5.00 Torr
Cooling Method(s) Method
Forced Air
Water
Foreline Flange KF40
Inlet Flange ISO160-F
Compression Ratio(s) N2: 100000000
He: 500000
H2: 20000
Weight Lbs 33.0
Weight kg 15.0
Lubrication Type Dry
Vacuum Range High Vacuum (10-4 - 10-8 Torr)
Technology Type Turbomolecular
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