Specifications
Manufacturer |
Edwards Vacuum |
Model |
STPA803C |
Pumping Speeds |
N2: 800 L/s
H2: 520 L/s
|
Ultimate Pressure |
ISO-F Flange
1.33 x 10-9
hPA
1.33 x 10-9
mbar
1.33 x 10-7
Pa
1.00 x 10-9
Torr
|
Max Foreline Pressure |
2.67 hPA
2.67 mbar
266 Pa
2.00 Torr
|
Cooling Method(s)
|
Method
Forced Air
Water
|
Foreline Flange |
KF40 |
Inlet Flange |
ISO160-F |
Compression Ratio(s) |
N2: 100000000
H2: 1000
|
Weight Lbs |
85.8 |
Weight kg
|
39.0 |
Lubrication Type |
Dry |
Vacuum Range |
High Vacuum (10-4 - 10-8 Torr) |
Technology Type |
Turbomolecular |