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PT660Z080

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Specifications

Manufacturer	Edwards Vacuum
Model	STP-XZ3203C
Pumping Speeds	N2: 3200 L/s H2: 2300 L/s
Ultimate Pressure	ConFlat Flange 1.33 x 10^-10 hPA 1.33 x 10^-10 mbar 1.33 x 10^-8 Pa 1.00 x 10^-10 Torr
Max Foreline Pressure	2.67 hPA 2.67 mbar 266 Pa 2.00 Torr
Cooling Method(s)	Method Forced Air Water
Foreline Flange	KF40
Inlet Flange	DN250CF (12.00" OD)
Compression Ratio(s)	N2: 100000000 H2: 25000
Lubrication Type	Dry
Vacuum Range	High Vacuum (10^-4 - 10^-8 Torr)
Technology Type	Turbomolecular