Representative Image
V70S Series:
Rectangular Transfer Valve (Slit Valves) With Housing Cover
Applications
- Plasma Etch, CVD, Sputter Deposition
- Manufacturing of solar panels
- Semiconductor processing
- LCD/flat panel processes
- All other cluster vacuum systems
Features
- Removable valve housing cover
- Semi standard application (Semi E21-94, Semi E24-92, Semi E21.1-1296)
- Patented L-motion link and dual shifts without springs in the actuator enable faster, smoother actuation with significantly reduced vibration
- Dust seal on the vacuum side of the bonnet flange that virtually eliminates particulate from entering the bellows
- Mechanical locking so at the end of gate travel the valve locks into position
- Welded bellows actuator seal
- Bonnet flange bolts are designed with retainers to eliminate bolts from falling out upon disassembly
Options
- Custom sizes available
- Various o-ring compounds (Kalrez®, Chemraz®, etc.)
Specifications Table
| Manufacturer |
KJLC
|
|---|---|
| Series |
V70
|
| Pressure |
Torr Min: 7.50×10-10 Torr Max: 900 Torr mbar Min: 1.00×10-9 mbar Max: 1200 mbar |
| Rates |
Helium Leak Rate 1.00×10-9 mbar*L/s 7.50×10-10 Torr*L/s Max Differential Pressure Before Open 30.0 mbar 22.5 Torr |
| Temperature |
Bake Actuator Temp 60.0 ºC 140 ºF Bake Body Temp 120 ºC 248 ºF Bake Gate Temp 120 ºC 248 ºF |
|
Shaft Seal Type |
Bellows Sealed
|
|
Cycle Life |
1,000,000 |
|
Actuator Type |
Pneumatic Double Acting
|
|
Valve Body Material |
Aluminum
|
|
Gate Seal Material |
Fluorocarbon (FKM)
|
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Ordering Table
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