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DPD10000SGA
EUDF - PUMP, DIFFUSION AGILENT HS-20, 20" ASA INLET FLANGE, 10000 L/S, 480V THREE PHASE

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HS-20 Series Manual
HS-20 Series Manual
For a download of the product manual, click here.
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Pumps FAQ
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Specifications

Manufacturer Agilent
Model HS-20
Pumping Speeds
N2: 10000 L/s
He: 12500 L/s
H2: 12500 L/s
Ultimate Pressure
Ultimate
5.00 x 10-8 hPA
5.00 x 10-8 mbar
5.00 x 10-6 Pa
3.75 x 10-8 Torr
Max Foreline Pressure 7.20 x 10-1 mbar
5.50 x 10-1 Torr
Cooling Method(s) Method
Water
Water Flow Rate
90 gal/hr
300 L/hr
Foreline Flange ISO63-K
Inlet Flange 20" ASA
Oil Capacity Quarts
*Unless otherwise noted		 4.97
Oil Capacity Liters
*Unless otherwise noted 		4.70
Weight Lbs 580
Weight kg 264
Lubrication Type Wet
Vacuum Range High Vacuum (10-4 - 10-8 Torr)
Technology Type Diffusion
Contact Us - DPD10000SGA - EUDF - PUMP, DIFFUSION AGILENT HS-20, 20" ASA INLET FLANGE, 10000 L/S, 480V THREE PHASE