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SM8144541 - Shimadzu 203LM/LMC Turbo Pump, MagLev, DN100CF (6.00 enlarge image tool

SM8144541 Shimadzu 203LM/LMC Turbo Pump, MagLev, DN100CF (6.00" OD) inlet flange, 190 L/s, Forced Air Cooling

SKU: SKU0146638
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203LM/LMC Series Manual
203LM/LMC Series Manual
For a download of the product manual, click here.
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Specifications

Manufacturer Shimadzu
Model 203LM/LMC
Pumping Speeds
N2: 190 L/s
He: 140 L/s
H2: 120 L/s
Ultimate Pressure
ConFlat Flange
1.33×10-10 mbar
1.00×10-10 Torr
Max Foreline Pressure 5.30 mbar
4.00 Torr
Cooling Method(s) Method
Forced Air
Water
Foreline Flange KF25
Inlet Flange DN100CF (6.00" OD)
Compression Ratio(s) N2: 1.00×109
He: 6.00×104
H2: 4000.00
Weight Lbs 19.8
Weight kg 9.00
Lubrication Type Dry
Vacuum Range High Vacuum (10-4 - 10-8 Torr) - Ultra High Vacuum (10-9 - 10-12 Torr)
Technology Type Turbomolecular
Charts
203LM/LMC enlarge image tool
 
203LM/LMC 203LM
Contact Us - SM8144541 - Shimadzu 203LM/LMC Turbo Pump, MagLev, DN100CF (6.00" OD) inlet flange, 190 L/s, Forced Air Cooling