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B8G210C01
TURBO PUMP, nEXT85D, CF63, 80W

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 Notes: 
1.
All pumps require a Controller and Power Cord for proper operation. An Inlet Screen, Vent Valve, and Air Cooling Fan may be required for select applications.
nEXT85D Series Manual
For a download of the product manual, click here.
Pumps FAQ
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Specifications

Manufacturer Edwards
Model nEXT85D
Pumping Speeds
N2: 84.0 L/s
Ar: 80.0 L/s
H2: 54.0 L/s
He: 78.0 L/s
Max Gas Throughput Ar: 21.0 mbar*L/s
He: 232 mbar*L/s
N2: 60.0 mbar*L/s
Ultimate Pressure
ConFlat Flange
5.00 x 10-10 hPA
5.00 x 10-10 mbar
5.00 x 10-8 Pa
3.75 x 10-10 Torr
ISO-K Flange
8.00 x 10-8 hPA
8.00 x 10-8 mbar
8.00 x 10-6 Pa
6.00 x 10-8 Torr
Max Foreline Pressure 1.90 x 101 hPA
1.90 x 101 mbar
1.90 x 103 Pa
1.43 x 101 Torr
Cooling Method(s) Method
Forced Air
Water
Foreline Flange KF16
Inlet Flange DN63CF (4.50" OD)
Compression Ratio(s) Ar: 1.00 x 109
H2: 2.10 x 105
He: 8.50 x 106
N2: 1.00 x 1011
Weight Lbs 9.68
Weight kg 4.40
Lubrication Type Dry
Vacuum Range Ultra High Vacuum (10-9 - 10-12 Torr)
Technology Type Turbomolecular
Dimensional Drawings
 
Tstation 85D Tstation 85W
Charts

Accessories Table

For Pump Model(s) Description Part Number Price In Stock Add To Cart Combine How to Combine - Click the checkboxes of the parts you would like to purchase and then click the button below to add all parts selected into your Cart.
For Pump Model(s) Description Part Number Price In Stock Add To Cart Combine
EXT75DX, nEXT85D Bolting Kit, For DN63CF (4.50" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket
DN63CF-HDKIT
P.O.R.
Call for Availability Add Item
EXT75DX, nEXT85D Clamping Kit, For QF16 Flange, Including Aluminum Clamp and FKM Centering Ring
QF16-HDKIT
P.O.R.
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All EXT and nEXT series pumps Coolers for ACX75 Air Cooling Accessory
B58053075
$359.00
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All EXT and nEXT series pumps Main Cables (suitable for TIC or relay box)
EUR 2m
D40013030
P.O.R.
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All EXT and nEXT series pumps Main Cables (suitable for TIC or relay box)
US 2m
D40013120
$15.33
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All EXT and nEXT series pumps TAG Turbo and active gauge controller
D39592000
P.O.R.
In Stock
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All EXT and nEXT series pumps TAV5 Vent Valve
B58066010
$507.00
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All EXT and nEXT series pumps TIC RS232 interface cable 2m
D39700834
$57.36
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All EXT and nEXT series pumps TIC Relay Box for Small Backing Pump
D39711805
P.O.R.
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All EXT and nEXT series pumps TIC logic interface cable
D39700833
P.O.R.
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All EXT and nEXT series pumps TIC100 Turbo and Instruments Controllers
D39721000
P.O.R.
In Stock
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nEXT series pumps TIC200 Turbo Controller
D39712000
P.O.R.
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All EXT and nEXT series pumps XDD/DX/EXDC extension cable 2m
D39700836
$352.00
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nEXT series pumps nEXT Bearing Change Tool
B80000805
P.O.R.
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nEXT series pumps nEXT Oil Cartridge
B80000811
P.O.R.
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nEXT series pumps nEXT Oil Cartridge Change Tool
B80000812
P.O.R.
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nEXT85 nEXT Radial Fan, AXC85
B8G200820
P.O.R.
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nEXT series pumps nEXT Replacement Bearing Assembly
B80000810
P.O.R.
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nEXT series pumps nEXT Water Cooling
B80000815
P.O.R.
In Stock
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How to Combine Click the checkboxes of the parts you would like to purchase and then click the button below to add all parts selected into your Cart.
Contact Us - B8G210C01 - TURBO PUMP, nEXT85D, CF63, 80W