EMT1307MBAB-PKGEbara EMT1307 MagLev Turbo Pump Package that includes: EMT1307 Turbo Pump with ISO200-F Inlet Flange, Controller, and Motor Cable
SKU: SKU0316127
Unit Price:
P.O.R.
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Specifications
Manufacturer
EBARA
Model
EMT1300/C
Pumping Speeds
N2: 1300 L/s H2: 1200 L/s
Max Gas Throughput
Ar: 1500 mbar*L/s N2: 3000 mbar*L/s
Ultimate Pressure
ISO-F Flange 1.00×10-8 mbar 7.50×10-9 Torr
Max Foreline Pressure
5.05 mbar 3.80 Torr
Cooling Method(s)
Method
Forced Air
Water
Foreline Flange
NW40
Inlet Flange
ISO200-F
Compression Ratio(s)
N2:1.00×108 H2:1.50×104
Weight Lbs
92.4
Weight kg
42.0
Lubrication Type
Dry
Vacuum Range
High Vacuum (10-4 - 10-8 Torr)
Technology Type
Turbomolecular
Accessories Table
Contact Us - EMT1307MBAB-PKG - Ebara EMT1307 MagLev Turbo Pump Package that includes: EMT1307 Turbo Pump with ISO200-F Inlet Flange, Controller, and Motor Cable