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EMT1307MBAB-PKG
EBARA EMT1300/C Turbo Pump, MagLev, ISO200-F inlet flange, 1300 L/s, Forced Air Cooling

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Specifications

Manufacturer	EBARA
Model	EMT1300/C
Pumping Speeds	N2: 1300 L/s H2: 1200 L/s
Max Gas Throughput	Ar: 1500 mbarL/s N2:* 3000 mbar*L/s
Ultimate Pressure	ISO-F Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr
Max Foreline Pressure	5.05 hPA 5.05 mbar 506 Pa 3.80 Torr
Cooling Method(s)	Method Forced Air Water
Foreline Flange	NW40
Inlet Flange	ISO200-F
Compression Ratio(s)	N2: 100000000 H2: 15000
Weight Lbs	92.4
Weight kg	42.0
Lubrication Type	Dry
Vacuum Range	High Vacuum (10^-4 - 10^-8 Torr)
Technology Type	Turbomolecular