EMT397MBAB-PKGEbara EMT397 MagLev Turbo Pump Package that includes: EMT397 Turbo Pump with ISO100-F Inlet Flange, Controller, and Motor Cable
SKU: SKU0316123
Unit Price:
P.O.R.
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Specifications
Manufacturer
EBARA
Model
EMT390/C
Pumping Speeds
N2: 340 L/s H2: 290 L/s
Max Gas Throughput
Ar: 700 mbar*L/s N2: 2000 mbar*L/s
Ultimate Pressure
ISO-F Flange 1.00×10-8 mbar 7.50×10-9 Torr
Max Foreline Pressure
3.99 mbar 3.00 Torr
Cooling Method(s)
Method
Forced Air
Water
Foreline Flange
NW25
Inlet Flange
ISO100-F
Compression Ratio(s)
N2:1.00×108 H2:4500.00
Weight Lbs
81.4
Weight kg
37.0
Lubrication Type
Dry
Vacuum Range
High Vacuum (10-4 - 10-8 Torr)
Technology Type
Turbomolecular
Accessories Table
Contact Us - EMT397MBAB-PKG - Ebara EMT397 MagLev Turbo Pump Package that includes: EMT397 Turbo Pump with ISO100-F Inlet Flange, Controller, and Motor Cable