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EMT397MBAB-PKG
EBARA EMT390/C Turbo Pump, MagLev, ISO100-F inlet flange, 340 L/s, Forced Air Cooling

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Specifications

Manufacturer EBARA
Model EMT390/C
Pumping Speeds
N2: 340 L/s
H2: 290 L/s
Max Gas Throughput Ar: 700 mbar*L/s
N2: 2000 mbar*L/s
Ultimate Pressure
ISO-F Flange
1.00 x 10-8 hPA
1.00 x 10-8 mbar
1.00 x 10-6 Pa
7.50 x 10-9 Torr
Max Foreline Pressure 3.99 hPA
3.99 mbar
399 Pa
3.00 Torr
Cooling Method(s) Method
Forced Air
Water
Foreline Flange NW25
Inlet Flange ISO100-F
Compression Ratio(s) N2: 100000000
H2: 4500
Weight Lbs 81.4
Weight kg 37.0
Lubrication Type Dry
Vacuum Range High Vacuum (10-4 - 10-8 Torr)
Technology Type Turbomolecular
Contact Us - EMT397MBAB-PKG - EBARA EMT390/C Turbo Pump, MagLev, ISO100-F inlet flange, 340 L/s, Forced Air Cooling