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EMT427MBAB-PKG
EBARA EMT420/C Turbo Pump, MagLev, ISO160-F inlet flange, 400 L/s, Forced Air Cooling

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Specifications

Manufacturer	EBARA
Model	EMT420/C
Pumping Speeds	N2: 400 L/s H2: 300 L/s
Max Gas Throughput	Ar: 700 mbarL/s N2:* 2000 mbar*L/s
Ultimate Pressure	ISO-F Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr
Max Foreline Pressure	3.99 hPA 3.99 mbar 399 Pa 3.00 Torr
Cooling Method(s)	Method Forced Air Water
Foreline Flange	NW25
Inlet Flange	ISO160-F
Compression Ratio(s)	N2: 100000000 H2: 4500
Weight Lbs	37.4
Weight kg	17.0
Lubrication Type	Dry
Vacuum Range	High Vacuum (10^-4 - 10^-8 Torr)
Technology Type	Turbomolecular